JPS548181A - Liquid phase epitaxial growth method for drystal - Google Patents

Liquid phase epitaxial growth method for drystal

Info

Publication number
JPS548181A
JPS548181A JP7324677A JP7324677A JPS548181A JP S548181 A JPS548181 A JP S548181A JP 7324677 A JP7324677 A JP 7324677A JP 7324677 A JP7324677 A JP 7324677A JP S548181 A JPS548181 A JP S548181A
Authority
JP
Japan
Prior art keywords
drystal
liquid phase
epitaxial growth
growth method
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7324677A
Other languages
Japanese (ja)
Other versions
JPS5919916B2 (en
Inventor
Akio Yamaguchi
Saburo Nakai
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7324677A priority Critical patent/JPS5919916B2/en
Publication of JPS548181A publication Critical patent/JPS548181A/en
Publication of JPS5919916B2 publication Critical patent/JPS5919916B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To prepare multilayer epitaxial wafer of large area independently of the dimension of the liq. reservoir, by simultaneous contact of the surface of a substrate with two kinds or more of molten liq., and by moving the substrate at a const. speed in the direction of the arrangement of the molten liq.
COPYRIGHT: (C)1979,JPO&Japio
JP7324677A 1977-06-22 1977-06-22 Liquid phase epitaxial growth method Expired JPS5919916B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7324677A JPS5919916B2 (en) 1977-06-22 1977-06-22 Liquid phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7324677A JPS5919916B2 (en) 1977-06-22 1977-06-22 Liquid phase epitaxial growth method

Publications (2)

Publication Number Publication Date
JPS548181A true JPS548181A (en) 1979-01-22
JPS5919916B2 JPS5919916B2 (en) 1984-05-09

Family

ID=13512624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7324677A Expired JPS5919916B2 (en) 1977-06-22 1977-06-22 Liquid phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS5919916B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60261130A (en) * 1984-05-23 1985-12-24 バイエル・アクチエンゲゼルシヤフト Method of producing foil of semiconductor and device therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60261130A (en) * 1984-05-23 1985-12-24 バイエル・アクチエンゲゼルシヤフト Method of producing foil of semiconductor and device therefor
JPH0347572B2 (en) * 1984-05-23 1991-07-19 Bayer Ag

Also Published As

Publication number Publication date
JPS5919916B2 (en) 1984-05-09

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