JPS548181A - Liquid phase epitaxial growth method for drystal - Google Patents
Liquid phase epitaxial growth method for drystalInfo
- Publication number
- JPS548181A JPS548181A JP7324677A JP7324677A JPS548181A JP S548181 A JPS548181 A JP S548181A JP 7324677 A JP7324677 A JP 7324677A JP 7324677 A JP7324677 A JP 7324677A JP S548181 A JPS548181 A JP S548181A
- Authority
- JP
- Japan
- Prior art keywords
- drystal
- liquid phase
- epitaxial growth
- growth method
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prepare multilayer epitaxial wafer of large area independently of the dimension of the liq. reservoir, by simultaneous contact of the surface of a substrate with two kinds or more of molten liq., and by moving the substrate at a const. speed in the direction of the arrangement of the molten liq.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7324677A JPS5919916B2 (en) | 1977-06-22 | 1977-06-22 | Liquid phase epitaxial growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7324677A JPS5919916B2 (en) | 1977-06-22 | 1977-06-22 | Liquid phase epitaxial growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS548181A true JPS548181A (en) | 1979-01-22 |
JPS5919916B2 JPS5919916B2 (en) | 1984-05-09 |
Family
ID=13512624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7324677A Expired JPS5919916B2 (en) | 1977-06-22 | 1977-06-22 | Liquid phase epitaxial growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5919916B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60261130A (en) * | 1984-05-23 | 1985-12-24 | バイエル・アクチエンゲゼルシヤフト | Method of producing foil of semiconductor and device therefor |
-
1977
- 1977-06-22 JP JP7324677A patent/JPS5919916B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60261130A (en) * | 1984-05-23 | 1985-12-24 | バイエル・アクチエンゲゼルシヤフト | Method of producing foil of semiconductor and device therefor |
JPH0347572B2 (en) * | 1984-05-23 | 1991-07-19 | Bayer Ag |
Also Published As
Publication number | Publication date |
---|---|
JPS5919916B2 (en) | 1984-05-09 |
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