JPS5265184A - Eqipment for simultaneous sputtering at both surface - Google Patents

Eqipment for simultaneous sputtering at both surface

Info

Publication number
JPS5265184A
JPS5265184A JP14198075A JP14198075A JPS5265184A JP S5265184 A JPS5265184 A JP S5265184A JP 14198075 A JP14198075 A JP 14198075A JP 14198075 A JP14198075 A JP 14198075A JP S5265184 A JPS5265184 A JP S5265184A
Authority
JP
Japan
Prior art keywords
eqipment
substrate
simultaneous sputtering
thin film
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14198075A
Other languages
Japanese (ja)
Inventor
Seiji Hattori
Yoshiichi Ishii
Akira Terada
Akira Nohara
Nobuo Inagaki
Wakatake Matsuda
Susumu Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP14198075A priority Critical patent/JPS5265184A/en
Publication of JPS5265184A publication Critical patent/JPS5265184A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE: To attain the improvement of working efficiency and the uniformalization of characteristics of thin film, by constituting so that the thin film may be formed on both surface of the substrate at the same time by equipping two electrode couples on the both sides of the substrate and carrying out the sputtering while rotating the substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP14198075A 1975-11-26 1975-11-26 Eqipment for simultaneous sputtering at both surface Pending JPS5265184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14198075A JPS5265184A (en) 1975-11-26 1975-11-26 Eqipment for simultaneous sputtering at both surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14198075A JPS5265184A (en) 1975-11-26 1975-11-26 Eqipment for simultaneous sputtering at both surface

Publications (1)

Publication Number Publication Date
JPS5265184A true JPS5265184A (en) 1977-05-30

Family

ID=15304586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14198075A Pending JPS5265184A (en) 1975-11-26 1975-11-26 Eqipment for simultaneous sputtering at both surface

Country Status (1)

Country Link
JP (1) JPS5265184A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195323A (en) * 1983-04-20 1984-11-06 Victor Co Of Japan Ltd Manufacture of vertical magnetic recording medium
JPH01125530U (en) * 1988-05-12 1989-08-28
US5858450A (en) * 1993-12-17 1999-01-12 Canon Kabushiki Kaisha Film forming method and apparatus therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010787A (en) * 1973-06-05 1975-02-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010787A (en) * 1973-06-05 1975-02-04

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195323A (en) * 1983-04-20 1984-11-06 Victor Co Of Japan Ltd Manufacture of vertical magnetic recording medium
JPH01125530U (en) * 1988-05-12 1989-08-28
JPH0351971Y2 (en) * 1988-05-12 1991-11-08
US5858450A (en) * 1993-12-17 1999-01-12 Canon Kabushiki Kaisha Film forming method and apparatus therefor

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