JPS53123084A - Short channel mosfet and production of the same - Google Patents

Short channel mosfet and production of the same

Info

Publication number
JPS53123084A
JPS53123084A JP3699777A JP3699777A JPS53123084A JP S53123084 A JPS53123084 A JP S53123084A JP 3699777 A JP3699777 A JP 3699777A JP 3699777 A JP3699777 A JP 3699777A JP S53123084 A JPS53123084 A JP S53123084A
Authority
JP
Japan
Prior art keywords
channel mosfet
short channel
production
same
shaloow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3699777A
Other languages
Japanese (ja)
Inventor
Eiji Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3699777A priority Critical patent/JPS53123084A/en
Publication of JPS53123084A publication Critical patent/JPS53123084A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a short channel MOSFET of a high operating speed by diffusing As through the use of an As ion blocking film having serration s and forming source and drain regions having diffused layers which are deep in the region where wiring metals are to be mounted and are shaloow in the regions adjoining thereto.
JP3699777A 1977-04-01 1977-04-01 Short channel mosfet and production of the same Pending JPS53123084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3699777A JPS53123084A (en) 1977-04-01 1977-04-01 Short channel mosfet and production of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3699777A JPS53123084A (en) 1977-04-01 1977-04-01 Short channel mosfet and production of the same

Publications (1)

Publication Number Publication Date
JPS53123084A true JPS53123084A (en) 1978-10-27

Family

ID=12485363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3699777A Pending JPS53123084A (en) 1977-04-01 1977-04-01 Short channel mosfet and production of the same

Country Status (1)

Country Link
JP (1) JPS53123084A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02353A (en) * 1989-02-13 1990-01-05 Seiko Epson Corp Cmos type semiconductor device
US5055420A (en) * 1984-11-22 1991-10-08 Hitachi, Ltd. Process for fabricating semiconductor integrated circuit devices
JPH05308129A (en) * 1991-12-26 1993-11-19 Seiko Epson Corp Insulated gate type field effect transistor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5055420A (en) * 1984-11-22 1991-10-08 Hitachi, Ltd. Process for fabricating semiconductor integrated circuit devices
JPH02353A (en) * 1989-02-13 1990-01-05 Seiko Epson Corp Cmos type semiconductor device
JPH05308129A (en) * 1991-12-26 1993-11-19 Seiko Epson Corp Insulated gate type field effect transistor

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