JPS53108288A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53108288A JPS53108288A JP2345477A JP2345477A JPS53108288A JP S53108288 A JPS53108288 A JP S53108288A JP 2345477 A JP2345477 A JP 2345477A JP 2345477 A JP2345477 A JP 2345477A JP S53108288 A JPS53108288 A JP S53108288A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- layer
- gaas
- elimination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Led Devices (AREA)
Abstract
PURPOSE: To decrease the thickness of the substrate with elimination of the strain occurrence as well as to facilitate an easy pellet isolation, by providing a coating cooling layer at the selective etching part of n++ layer of n++-n--P or n++-n--n+ GaAs and then giving the mesa etching to p or n+layer side.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2345477A JPS53108288A (en) | 1977-03-03 | 1977-03-03 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2345477A JPS53108288A (en) | 1977-03-03 | 1977-03-03 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53108288A true JPS53108288A (en) | 1978-09-20 |
Family
ID=12110938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2345477A Pending JPS53108288A (en) | 1977-03-03 | 1977-03-03 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53108288A (en) |
-
1977
- 1977-03-03 JP JP2345477A patent/JPS53108288A/en active Pending
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