JPS53108288A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53108288A
JPS53108288A JP2345477A JP2345477A JPS53108288A JP S53108288 A JPS53108288 A JP S53108288A JP 2345477 A JP2345477 A JP 2345477A JP 2345477 A JP2345477 A JP 2345477A JP S53108288 A JPS53108288 A JP S53108288A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
layer
gaas
elimination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2345477A
Other languages
Japanese (ja)
Inventor
Takeshi Suzuki
Mikio Nishihata
Michihiro Ito
Hironobu Hatakeyama
Hidejiro Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2345477A priority Critical patent/JPS53108288A/en
Publication of JPS53108288A publication Critical patent/JPS53108288A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To decrease the thickness of the substrate with elimination of the strain occurrence as well as to facilitate an easy pellet isolation, by providing a coating cooling layer at the selective etching part of n++ layer of n++-n--P or n++-n--n+ GaAs and then giving the mesa etching to p or n+layer side.
COPYRIGHT: (C)1978,JPO&Japio
JP2345477A 1977-03-03 1977-03-03 Manufacture of semiconductor device Pending JPS53108288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2345477A JPS53108288A (en) 1977-03-03 1977-03-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2345477A JPS53108288A (en) 1977-03-03 1977-03-03 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53108288A true JPS53108288A (en) 1978-09-20

Family

ID=12110938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2345477A Pending JPS53108288A (en) 1977-03-03 1977-03-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53108288A (en)

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