JPS53105965A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53105965A JPS53105965A JP2123277A JP2123277A JPS53105965A JP S53105965 A JPS53105965 A JP S53105965A JP 2123277 A JP2123277 A JP 2123277A JP 2123277 A JP2123277 A JP 2123277A JP S53105965 A JPS53105965 A JP S53105965A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- epitaxial layer
- concentration
- distirubtion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2123277A JPS53105965A (en) | 1977-02-28 | 1977-02-28 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2123277A JPS53105965A (en) | 1977-02-28 | 1977-02-28 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53105965A true JPS53105965A (en) | 1978-09-14 |
Family
ID=12049277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2123277A Pending JPS53105965A (en) | 1977-02-28 | 1977-02-28 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53105965A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4910156A (en) * | 1986-04-30 | 1990-03-20 | Toshiba Ceramics Co., Ltd. | Neutron transmutation doping of a silicon wafer |
-
1977
- 1977-02-28 JP JP2123277A patent/JPS53105965A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4910156A (en) * | 1986-04-30 | 1990-03-20 | Toshiba Ceramics Co., Ltd. | Neutron transmutation doping of a silicon wafer |
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