JPS53102283A - Epitaxially growth method in liquid phase - Google Patents
Epitaxially growth method in liquid phaseInfo
- Publication number
- JPS53102283A JPS53102283A JP1695477A JP1695477A JPS53102283A JP S53102283 A JPS53102283 A JP S53102283A JP 1695477 A JP1695477 A JP 1695477A JP 1695477 A JP1695477 A JP 1695477A JP S53102283 A JPS53102283 A JP S53102283A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- growth method
- epitaxially growth
- heating furnace
- epitaxially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To suppress the escape of O2 and to obtain the red luminescent diode having high luminescent efficiency, by installing the auxiliary heating furnace for holding the temperature higher than the first heating furance for forming the soaking zone for the growth of epitaxial layer over the above first heating furnace.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1695477A JPS53102283A (en) | 1977-02-17 | 1977-02-17 | Epitaxially growth method in liquid phase |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1695477A JPS53102283A (en) | 1977-02-17 | 1977-02-17 | Epitaxially growth method in liquid phase |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53102283A true JPS53102283A (en) | 1978-09-06 |
JPS5611677B2 JPS5611677B2 (en) | 1981-03-16 |
Family
ID=11930497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1695477A Granted JPS53102283A (en) | 1977-02-17 | 1977-02-17 | Epitaxially growth method in liquid phase |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53102283A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02251119A (en) * | 1989-03-24 | 1990-10-08 | Shin Etsu Chem Co Ltd | Manufacture of single-crystal magnetic film |
-
1977
- 1977-02-17 JP JP1695477A patent/JPS53102283A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02251119A (en) * | 1989-03-24 | 1990-10-08 | Shin Etsu Chem Co Ltd | Manufacture of single-crystal magnetic film |
Also Published As
Publication number | Publication date |
---|---|
JPS5611677B2 (en) | 1981-03-16 |
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