Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co LtdfiledCriticalNEC Home Electronics Ltd
Priority to JP983076ApriorityCriticalpatent/JPS5293272A/en
Publication of JPS5293272ApublicationCriticalpatent/JPS5293272A/en
PURPOSE: To prevent from breakage, deformation such as carvature, and a crystal defect at a cooling time, by cooling gradually up to a temperaure of 1000°C a semiconductor base plate at a cooling speed of 200°C perminute.
COPYRIGHT: (C)1977,JPO&Japio
JP983076A1976-01-301976-01-30Manufacture for semiconductor
PendingJPS5293272A
(en)