JPS5290270A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5290270A
JPS5290270A JP676076A JP676076A JPS5290270A JP S5290270 A JPS5290270 A JP S5290270A JP 676076 A JP676076 A JP 676076A JP 676076 A JP676076 A JP 676076A JP S5290270 A JPS5290270 A JP S5290270A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
resit
implanting
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP676076A
Other languages
English (en)
Inventor
Masahide Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP676076A priority Critical patent/JPS5290270A/ja
Publication of JPS5290270A publication Critical patent/JPS5290270A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP676076A 1976-01-23 1976-01-23 Production of semiconductor device Pending JPS5290270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP676076A JPS5290270A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP676076A JPS5290270A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5290270A true JPS5290270A (en) 1977-07-29

Family

ID=11647123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP676076A Pending JPS5290270A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5290270A (ja)

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