JPS5289468A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5289468A JPS5289468A JP493576A JP493576A JPS5289468A JP S5289468 A JPS5289468 A JP S5289468A JP 493576 A JP493576 A JP 493576A JP 493576 A JP493576 A JP 493576A JP S5289468 A JPS5289468 A JP S5289468A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor device
- substrate surface
- discharge
- electrically isolated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP493576A JPS5289468A (en) | 1976-01-21 | 1976-01-21 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP493576A JPS5289468A (en) | 1976-01-21 | 1976-01-21 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5289468A true JPS5289468A (en) | 1977-07-27 |
| JPS6132810B2 JPS6132810B2 (enrdf_load_stackoverflow) | 1986-07-29 |
Family
ID=11597425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP493576A Granted JPS5289468A (en) | 1976-01-21 | 1976-01-21 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5289468A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5428571A (en) * | 1977-08-08 | 1979-03-03 | Hitachi Ltd | Semiconductor device |
| JPS5735325A (en) * | 1980-08-13 | 1982-02-25 | Hitachi Ltd | Semiconductor device and manufacture thereof |
| JPH0289346A (ja) * | 1988-09-27 | 1990-03-29 | Toshiba Corp | 半導体装置及びその製造方法 |
| JPH04130664A (ja) * | 1990-09-20 | 1992-05-01 | Fujitsu Ltd | 半導体装置およびその製造方法 |
-
1976
- 1976-01-21 JP JP493576A patent/JPS5289468A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5428571A (en) * | 1977-08-08 | 1979-03-03 | Hitachi Ltd | Semiconductor device |
| JPS5735325A (en) * | 1980-08-13 | 1982-02-25 | Hitachi Ltd | Semiconductor device and manufacture thereof |
| JPH0289346A (ja) * | 1988-09-27 | 1990-03-29 | Toshiba Corp | 半導体装置及びその製造方法 |
| JPH04130664A (ja) * | 1990-09-20 | 1992-05-01 | Fujitsu Ltd | 半導体装置およびその製造方法 |
| JPH0834304B2 (ja) * | 1990-09-20 | 1996-03-29 | 富士通株式会社 | 半導体装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6132810B2 (enrdf_load_stackoverflow) | 1986-07-29 |
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