JPS5289459A - Stereo scan electron microscope - Google Patents

Stereo scan electron microscope

Info

Publication number
JPS5289459A
JPS5289459A JP613776A JP613776A JPS5289459A JP S5289459 A JPS5289459 A JP S5289459A JP 613776 A JP613776 A JP 613776A JP 613776 A JP613776 A JP 613776A JP S5289459 A JPS5289459 A JP S5289459A
Authority
JP
Japan
Prior art keywords
electron microscope
scan electron
stereo scan
sample
stereo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP613776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5718827B2 (OSRAM
Inventor
Morihiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP613776A priority Critical patent/JPS5289459A/ja
Publication of JPS5289459A publication Critical patent/JPS5289459A/ja
Publication of JPS5718827B2 publication Critical patent/JPS5718827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP613776A 1976-01-21 1976-01-21 Stereo scan electron microscope Granted JPS5289459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP613776A JPS5289459A (en) 1976-01-21 1976-01-21 Stereo scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP613776A JPS5289459A (en) 1976-01-21 1976-01-21 Stereo scan electron microscope

Publications (2)

Publication Number Publication Date
JPS5289459A true JPS5289459A (en) 1977-07-27
JPS5718827B2 JPS5718827B2 (OSRAM) 1982-04-19

Family

ID=11630106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP613776A Granted JPS5289459A (en) 1976-01-21 1976-01-21 Stereo scan electron microscope

Country Status (1)

Country Link
JP (1) JPS5289459A (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144469A (OSRAM) * 1974-10-14 1976-04-16 Hitachi Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5144469A (OSRAM) * 1974-10-14 1976-04-16 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5718827B2 (OSRAM) 1982-04-19

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