JPS5269562A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5269562A
JPS5269562A JP14502675A JP14502675A JPS5269562A JP S5269562 A JPS5269562 A JP S5269562A JP 14502675 A JP14502675 A JP 14502675A JP 14502675 A JP14502675 A JP 14502675A JP S5269562 A JPS5269562 A JP S5269562A
Authority
JP
Japan
Prior art keywords
semiconductor device
conductive layer
manufacture
area
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14502675A
Other languages
Japanese (ja)
Inventor
Takeo Yoshimi
Katsuo Sugawara
Sumio Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14502675A priority Critical patent/JPS5269562A/en
Publication of JPS5269562A publication Critical patent/JPS5269562A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: The area of the conductive layer which has hitherto been removed by etching is eliminated for the stage error at it terminal section by turning the area into a nitride through nitrifying method. At the same time, the surface of conductive layer to become later wiring or eelctrode is covered with nitride film after pattern formation. As a result, anti-corrosion property of semiconductor device can be increased.
COPYRIGHT: (C)1977,JPO&Japio
JP14502675A 1975-12-08 1975-12-08 Manufacture of semiconductor device Pending JPS5269562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14502675A JPS5269562A (en) 1975-12-08 1975-12-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14502675A JPS5269562A (en) 1975-12-08 1975-12-08 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5269562A true JPS5269562A (en) 1977-06-09

Family

ID=15375694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14502675A Pending JPS5269562A (en) 1975-12-08 1975-12-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5269562A (en)

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