JPS5269562A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5269562A JPS5269562A JP14502675A JP14502675A JPS5269562A JP S5269562 A JPS5269562 A JP S5269562A JP 14502675 A JP14502675 A JP 14502675A JP 14502675 A JP14502675 A JP 14502675A JP S5269562 A JPS5269562 A JP S5269562A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- conductive layer
- manufacture
- area
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: The area of the conductive layer which has hitherto been removed by etching is eliminated for the stage error at it terminal section by turning the area into a nitride through nitrifying method. At the same time, the surface of conductive layer to become later wiring or eelctrode is covered with nitride film after pattern formation. As a result, anti-corrosion property of semiconductor device can be increased.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14502675A JPS5269562A (en) | 1975-12-08 | 1975-12-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14502675A JPS5269562A (en) | 1975-12-08 | 1975-12-08 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5269562A true JPS5269562A (en) | 1977-06-09 |
Family
ID=15375694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14502675A Pending JPS5269562A (en) | 1975-12-08 | 1975-12-08 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5269562A (en) |
-
1975
- 1975-12-08 JP JP14502675A patent/JPS5269562A/en active Pending
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