JPS5260996A - Manufacturingend of dielectric thin film - Google Patents

Manufacturingend of dielectric thin film

Info

Publication number
JPS5260996A
JPS5260996A JP50137439A JP13743975A JPS5260996A JP S5260996 A JPS5260996 A JP S5260996A JP 50137439 A JP50137439 A JP 50137439A JP 13743975 A JP13743975 A JP 13743975A JP S5260996 A JPS5260996 A JP S5260996A
Authority
JP
Japan
Prior art keywords
thin film
dielectric thin
manufacturingend
ionization
collision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50137439A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619931B2 (enExample
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50137439A priority Critical patent/JPS5260996A/ja
Publication of JPS5260996A publication Critical patent/JPS5260996A/ja
Publication of JPS5619931B2 publication Critical patent/JPS5619931B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP50137439A 1975-11-14 1975-11-14 Manufacturingend of dielectric thin film Granted JPS5260996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50137439A JPS5260996A (en) 1975-11-14 1975-11-14 Manufacturingend of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50137439A JPS5260996A (en) 1975-11-14 1975-11-14 Manufacturingend of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5260996A true JPS5260996A (en) 1977-05-19
JPS5619931B2 JPS5619931B2 (enExample) 1981-05-11

Family

ID=15198639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50137439A Granted JPS5260996A (en) 1975-11-14 1975-11-14 Manufacturingend of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5260996A (enExample)

Also Published As

Publication number Publication date
JPS5619931B2 (enExample) 1981-05-11

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