JPS5258460A - Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source - Google Patents
Diffusion of impurity into semiconductor wafer from solid impurity dif fusion sourceInfo
- Publication number
- JPS5258460A JPS5258460A JP13410375A JP13410375A JPS5258460A JP S5258460 A JPS5258460 A JP S5258460A JP 13410375 A JP13410375 A JP 13410375A JP 13410375 A JP13410375 A JP 13410375A JP S5258460 A JPS5258460 A JP S5258460A
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- diffusion
- semiconductor wafer
- fusion source
- dif fusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13410375A JPS5258460A (en) | 1975-11-10 | 1975-11-10 | Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13410375A JPS5258460A (en) | 1975-11-10 | 1975-11-10 | Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5258460A true JPS5258460A (en) | 1977-05-13 |
JPS5344793B2 JPS5344793B2 (ja) | 1978-12-01 |
Family
ID=15120510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13410375A Granted JPS5258460A (en) | 1975-11-10 | 1975-11-10 | Diffusion of impurity into semiconductor wafer from solid impurity dif fusion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258460A (ja) |
-
1975
- 1975-11-10 JP JP13410375A patent/JPS5258460A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5344793B2 (ja) | 1978-12-01 |
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