JPS5243369A - Flat etching method for silicon - Google Patents
Flat etching method for siliconInfo
- Publication number
- JPS5243369A JPS5243369A JP11773475A JP11773475A JPS5243369A JP S5243369 A JPS5243369 A JP S5243369A JP 11773475 A JP11773475 A JP 11773475A JP 11773475 A JP11773475 A JP 11773475A JP S5243369 A JPS5243369 A JP S5243369A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- etching method
- flat etching
- flat
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11773475A JPS5243369A (en) | 1975-10-01 | 1975-10-01 | Flat etching method for silicon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11773475A JPS5243369A (en) | 1975-10-01 | 1975-10-01 | Flat etching method for silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5243369A true JPS5243369A (en) | 1977-04-05 |
JPS5530292B2 JPS5530292B2 (xx) | 1980-08-09 |
Family
ID=14718954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11773475A Granted JPS5243369A (en) | 1975-10-01 | 1975-10-01 | Flat etching method for silicon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5243369A (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4362599A (en) * | 1977-10-17 | 1982-12-07 | Hitachi, Ltd. | Method for making semiconductor device |
-
1975
- 1975-10-01 JP JP11773475A patent/JPS5243369A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4362599A (en) * | 1977-10-17 | 1982-12-07 | Hitachi, Ltd. | Method for making semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5530292B2 (xx) | 1980-08-09 |
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