JPS5229170A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5229170A
JPS5229170A JP10572175A JP10572175A JPS5229170A JP S5229170 A JPS5229170 A JP S5229170A JP 10572175 A JP10572175 A JP 10572175A JP 10572175 A JP10572175 A JP 10572175A JP S5229170 A JPS5229170 A JP S5229170A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
cancel
deformation
back sides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10572175A
Other languages
Japanese (ja)
Inventor
Isatake Kobayashi
Kazuo Miyauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP10572175A priority Critical patent/JPS5229170A/en
Publication of JPS5229170A publication Critical patent/JPS5229170A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To cancel a deformation and to prevent auto doping by growing layers of semiconductor crystal on both front and back sides of a substrate simultaneously.
COPYRIGHT: (C)1977,JPO&Japio
JP10572175A 1975-09-01 1975-09-01 Process for production of semiconductor device Pending JPS5229170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10572175A JPS5229170A (en) 1975-09-01 1975-09-01 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10572175A JPS5229170A (en) 1975-09-01 1975-09-01 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5229170A true JPS5229170A (en) 1977-03-04

Family

ID=14415182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10572175A Pending JPS5229170A (en) 1975-09-01 1975-09-01 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5229170A (en)

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