JPS5219966A - Semiconductor manufacturing process - Google Patents
Semiconductor manufacturing processInfo
- Publication number
- JPS5219966A JPS5219966A JP9559975A JP9559975A JPS5219966A JP S5219966 A JPS5219966 A JP S5219966A JP 9559975 A JP9559975 A JP 9559975A JP 9559975 A JP9559975 A JP 9559975A JP S5219966 A JPS5219966 A JP S5219966A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing process
- semiconductor manufacturing
- arsenic
- doped
- boron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To provide semiconductors having no grid break by using p-type silicon substrates which are doped with arsenic as well as boron.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9559975A JPS6051259B2 (en) | 1975-08-06 | 1975-08-06 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9559975A JPS6051259B2 (en) | 1975-08-06 | 1975-08-06 | Manufacturing method of semiconductor device |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9068784A Division JPS59218777A (en) | 1984-05-07 | 1984-05-07 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5219966A true JPS5219966A (en) | 1977-02-15 |
| JPS6051259B2 JPS6051259B2 (en) | 1985-11-13 |
Family
ID=14142011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9559975A Expired JPS6051259B2 (en) | 1975-08-06 | 1975-08-06 | Manufacturing method of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6051259B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6433873U (en) * | 1987-08-25 | 1989-03-02 |
-
1975
- 1975-08-06 JP JP9559975A patent/JPS6051259B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6051259B2 (en) | 1985-11-13 |
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