Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP11946875ApriorityCriticalpatent/JPS5244164A/en
Publication of JPS5244164ApublicationCriticalpatent/JPS5244164A/en
PURPOSE: To install a sealing tube at the center within a diffusion furnace by way of a good thermal conductive holder thereby performing effective impurity diffusion.
COPYRIGHT: (C)1977,JPO&Japio
JP11946875A1975-10-031975-10-03Process for productin of semiconductor
PendingJPS5244164A
(en)