JPS521869B2 - - Google Patents
Info
- Publication number
- JPS521869B2 JPS521869B2 JP47069360A JP6936072A JPS521869B2 JP S521869 B2 JPS521869 B2 JP S521869B2 JP 47069360 A JP47069360 A JP 47069360A JP 6936072 A JP6936072 A JP 6936072A JP S521869 B2 JPS521869 B2 JP S521869B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47069360A JPS521869B2 (no) | 1972-07-11 | 1972-07-11 | |
| GB3122073A GB1442177A (en) | 1972-07-11 | 1973-06-29 | Scanning electron microscope apparatus |
| US00377524A US3833811A (en) | 1972-07-11 | 1973-07-09 | Scanning electron microscope with improved means for focusing |
| FR7325225A FR2192374B1 (no) | 1972-07-11 | 1973-07-10 | |
| DE2335304A DE2335304B2 (de) | 1972-07-11 | 1973-07-11 | Rasterelektronenmikroskop |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47069360A JPS521869B2 (no) | 1972-07-11 | 1972-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4928267A JPS4928267A (no) | 1974-03-13 |
| JPS521869B2 true JPS521869B2 (no) | 1977-01-18 |
Family
ID=13400299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47069360A Expired JPS521869B2 (no) | 1972-07-11 | 1972-07-11 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3833811A (no) |
| JP (1) | JPS521869B2 (no) |
| DE (1) | DE2335304B2 (no) |
| FR (1) | FR2192374B1 (no) |
| GB (1) | GB1442177A (no) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3917946A (en) * | 1972-04-12 | 1975-11-04 | Philips Corp | Electron-optical device for the recording of selected diffraction patterns |
| JPS49118493A (no) * | 1973-03-12 | 1974-11-12 | ||
| DE2542356C2 (de) * | 1975-09-19 | 1977-10-20 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Fokussierung der Objektivlinse eines Korpuskular-Durchstrahlungs-Rastermikroskops und Einrichtung zur selbsttätigen Durchführung des Verfahrens, sowie Anwendung |
| NL7804039A (nl) * | 1978-04-17 | 1979-10-19 | Philips Nv | Elektronenmikroskoop met stigmator. |
| JPS5613649A (en) * | 1979-07-12 | 1981-02-10 | Akashi Seisakusho Co Ltd | Correcting method and device for astigmatism in scanning type electron microscope and the like |
| NL7906632A (nl) * | 1979-09-05 | 1981-03-09 | Philips Nv | Automatische bundelcorrektie in stem. |
| NL8304217A (nl) * | 1983-12-07 | 1985-07-01 | Philips Nv | Automatisch instelbare electronenmicroscoop. |
| JPS61168852A (ja) * | 1985-01-23 | 1986-07-30 | Hitachi Ltd | 透過形電子顕微鏡の焦点合せ装置 |
| SE446954B (sv) * | 1985-03-12 | 1986-10-20 | Uponor Ab | Sett vid extrudering av ett dubbelveggigt plastror samt extruderingsverktyg for utovning av settet |
| JPS61233950A (ja) * | 1985-04-10 | 1986-10-18 | Hitachi Ltd | 電子顕微鏡 |
| JPH073774B2 (ja) * | 1986-10-08 | 1995-01-18 | 株式会社日立製作所 | 電子顕微鏡 |
| DE3720560C1 (de) * | 1987-06-22 | 1988-09-15 | Bekum Maschf Gmbh | Coextrusionskopf |
| US4975578A (en) * | 1989-04-17 | 1990-12-04 | The Research Foundation Of State University Of Ny | Method and apparatus for determining distribution of mass density |
| JPH05343019A (ja) * | 1992-06-03 | 1993-12-24 | Hitachi Ltd | 荷電粒子線装置およびその観察方法 |
| US5650621A (en) * | 1993-06-21 | 1997-07-22 | Hitachi, Ltd. | Electron microscope |
| JP4896626B2 (ja) * | 2006-08-22 | 2012-03-14 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| JP4920370B2 (ja) * | 2006-10-30 | 2012-04-18 | 株式会社日立製作所 | 透過型電子顕微鏡の情報伝達限界測定法およびこの測定法が適用された透過型電子顕微鏡 |
| CN102184828B (zh) * | 2011-03-29 | 2013-02-06 | 北京航空航天大学 | 电子显微镜的第二聚光镜 |
| CN102169790B (zh) * | 2011-03-29 | 2012-07-04 | 北京航空航天大学 | 电子显微镜的第一聚光镜 |
| EP3163597A1 (en) * | 2015-11-02 | 2017-05-03 | FEI Company | Charged particle microscope with vibration detection/correction |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2627589A (en) * | 1950-10-30 | 1953-02-03 | Rca Corp | Focusing of electron optical apparatus |
| GB990239A (en) * | 1961-08-17 | 1965-04-28 | Christopher William Baisley Gr | Improvements in measuring systems for electron diffraction patterns |
| US3225192A (en) * | 1962-12-28 | 1965-12-21 | Hitachi Ltd | Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane |
| GB1058037A (en) * | 1964-11-03 | 1967-02-08 | Jeol Ltd | Electron beam apparatus |
| US3502870A (en) * | 1967-07-05 | 1970-03-24 | Hitachi Ltd | Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device |
| US3576438A (en) * | 1969-04-28 | 1971-04-27 | Bell Telephone Labor Inc | Focus monitor for electron microscope including an auxiliary electron gun and focusing lens |
| US3626184A (en) * | 1970-03-05 | 1971-12-07 | Atomic Energy Commission | Detector system for a scanning electron microscope |
-
1972
- 1972-07-11 JP JP47069360A patent/JPS521869B2/ja not_active Expired
-
1973
- 1973-06-29 GB GB3122073A patent/GB1442177A/en not_active Expired
- 1973-07-09 US US00377524A patent/US3833811A/en not_active Expired - Lifetime
- 1973-07-10 FR FR7325225A patent/FR2192374B1/fr not_active Expired
- 1973-07-11 DE DE2335304A patent/DE2335304B2/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| DE2335304B2 (de) | 1975-07-10 |
| JPS4928267A (no) | 1974-03-13 |
| FR2192374A1 (no) | 1974-02-08 |
| GB1442177A (en) | 1976-07-07 |
| FR2192374B1 (no) | 1977-05-13 |
| DE2335304A1 (de) | 1974-01-31 |
| US3833811A (en) | 1974-09-03 |