NL7804039A - Elektronenmikroskoop met stigmator. - Google Patents

Elektronenmikroskoop met stigmator.

Info

Publication number
NL7804039A
NL7804039A NL7804039A NL7804039A NL7804039A NL 7804039 A NL7804039 A NL 7804039A NL 7804039 A NL7804039 A NL 7804039A NL 7804039 A NL7804039 A NL 7804039A NL 7804039 A NL7804039 A NL 7804039A
Authority
NL
Netherlands
Prior art keywords
microskop
stigmator
electron
electron microskop
Prior art date
Application number
NL7804039A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7804039A priority Critical patent/NL7804039A/nl
Priority to GB7912910A priority patent/GB2019086A/en
Priority to DE19792915207 priority patent/DE2915207A1/de
Priority to JP4490479A priority patent/JPS54139459A/ja
Priority to FR7909633A priority patent/FR2423858A1/fr
Publication of NL7804039A publication Critical patent/NL7804039A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7804039A 1978-04-17 1978-04-17 Elektronenmikroskoop met stigmator. NL7804039A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL7804039A NL7804039A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met stigmator.
GB7912910A GB2019086A (en) 1978-04-17 1979-04-12 Electron Microscope Including a Stigmator
DE19792915207 DE2915207A1 (de) 1978-04-17 1979-04-14 Elektronenmikroskop mit stigmator
JP4490479A JPS54139459A (en) 1978-04-17 1979-04-14 Electron microscope
FR7909633A FR2423858A1 (fr) 1978-04-17 1979-04-17 Microscope electronique muni d'un organe stigmatique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804039A NL7804039A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met stigmator.

Publications (1)

Publication Number Publication Date
NL7804039A true NL7804039A (nl) 1979-10-19

Family

ID=19830666

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7804039A NL7804039A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met stigmator.

Country Status (5)

Country Link
JP (1) JPS54139459A (nl)
DE (1) DE2915207A1 (nl)
FR (1) FR2423858A1 (nl)
GB (1) GB2019086A (nl)
NL (1) NL7804039A (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901980C2 (de) * 1989-01-24 2001-06-28 Ceos Gmbh Multipolelement und Verfahren zur Herstellung eines Multipolelements

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521869B2 (nl) * 1972-07-11 1977-01-18
NL7416395A (nl) * 1974-12-17 1976-06-21 Philips Nv Elektronenmikroskoop.
DE2515550C2 (de) * 1975-04-09 1977-05-18 Siemens Ag Korpuskularstrahloptisches geraet zur abbildung einer maske auf ein zu bestrahlendes praeparat
DE2542356C2 (de) * 1975-09-19 1977-10-20 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Fokussierung der Objektivlinse eines Korpuskular-Durchstrahlungs-Rastermikroskops und Einrichtung zur selbsttätigen Durchführung des Verfahrens, sowie Anwendung

Also Published As

Publication number Publication date
JPS54139459A (en) 1979-10-29
GB2019086A (en) 1979-10-24
FR2423858A1 (fr) 1979-11-16
DE2915207A1 (de) 1979-10-25

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BV The patent application has lapsed