FR2423858A1 - Microscope electronique muni d'un organe stigmatique - Google Patents

Microscope electronique muni d'un organe stigmatique

Info

Publication number
FR2423858A1
FR2423858A1 FR7909633A FR7909633A FR2423858A1 FR 2423858 A1 FR2423858 A1 FR 2423858A1 FR 7909633 A FR7909633 A FR 7909633A FR 7909633 A FR7909633 A FR 7909633A FR 2423858 A1 FR2423858 A1 FR 2423858A1
Authority
FR
France
Prior art keywords
stigmatic
organ
microscope equipped
electronic microscope
octopole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7909633A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2423858A1 publication Critical patent/FR2423858A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7909633A 1978-04-17 1979-04-17 Microscope electronique muni d'un organe stigmatique Withdrawn FR2423858A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804039A NL7804039A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met stigmator.

Publications (1)

Publication Number Publication Date
FR2423858A1 true FR2423858A1 (fr) 1979-11-16

Family

ID=19830666

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7909633A Withdrawn FR2423858A1 (fr) 1978-04-17 1979-04-17 Microscope electronique muni d'un organe stigmatique

Country Status (5)

Country Link
JP (1) JPS54139459A (nl)
DE (1) DE2915207A1 (nl)
FR (1) FR2423858A1 (nl)
GB (1) GB2019086A (nl)
NL (1) NL7804039A (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901980C2 (de) * 1989-01-24 2001-06-28 Ceos Gmbh Multipolelement und Verfahren zur Herstellung eines Multipolelements

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2192374A1 (nl) * 1972-07-11 1974-02-08 Jeol Ltd
FR2295560A1 (fr) * 1974-12-17 1976-07-16 Philips Nv Appareil a faisceau electronique
DE2515550B1 (de) * 1975-04-09 1976-10-07 Siemens Ag Korpuskularstrahloptisches geraet zur abbildung einer maske auf ein zu bestrahlendes praeparat
DE2542356B1 (de) * 1975-09-19 1977-03-10 Siemens Ag Verfahren zur fokussierung der objektivlinse eines korpuskular-durchstrahlungs-rastermikroskops und einrichtung zur selbsttaetigen durchfuehrung des verfahrens sowie anwendung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2192374A1 (nl) * 1972-07-11 1974-02-08 Jeol Ltd
FR2295560A1 (fr) * 1974-12-17 1976-07-16 Philips Nv Appareil a faisceau electronique
DE2515550B1 (de) * 1975-04-09 1976-10-07 Siemens Ag Korpuskularstrahloptisches geraet zur abbildung einer maske auf ein zu bestrahlendes praeparat
DE2542356B1 (de) * 1975-09-19 1977-03-10 Siemens Ag Verfahren zur fokussierung der objektivlinse eines korpuskular-durchstrahlungs-rastermikroskops und einrichtung zur selbsttaetigen durchfuehrung des verfahrens sowie anwendung

Also Published As

Publication number Publication date
JPS54139459A (en) 1979-10-29
DE2915207A1 (de) 1979-10-25
GB2019086A (en) 1979-10-24
NL7804039A (nl) 1979-10-19

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Legal Events

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