FR2295560A1 - Appareil a faisceau electronique - Google Patents

Appareil a faisceau electronique

Info

Publication number
FR2295560A1
FR2295560A1 FR7538587A FR7538587A FR2295560A1 FR 2295560 A1 FR2295560 A1 FR 2295560A1 FR 7538587 A FR7538587 A FR 7538587A FR 7538587 A FR7538587 A FR 7538587A FR 2295560 A1 FR2295560 A1 FR 2295560A1
Authority
FR
France
Prior art keywords
beam device
electronic beam
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7538587A
Other languages
English (en)
Other versions
FR2295560B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2295560A1 publication Critical patent/FR2295560A1/fr
Application granted granted Critical
Publication of FR2295560B1 publication Critical patent/FR2295560B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance
FR7538587A 1974-12-17 1975-12-17 Appareil a faisceau electronique Granted FR2295560A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7416395A NL7416395A (nl) 1974-12-17 1974-12-17 Elektronenmikroskoop.

Publications (2)

Publication Number Publication Date
FR2295560A1 true FR2295560A1 (fr) 1976-07-16
FR2295560B1 FR2295560B1 (fr) 1982-02-26

Family

ID=19822658

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7538587A Granted FR2295560A1 (fr) 1974-12-17 1975-12-17 Appareil a faisceau electronique

Country Status (6)

Country Link
US (1) US4071765A (fr)
JP (1) JPS5185665A (fr)
DE (1) DE2555781C3 (fr)
FR (1) FR2295560A1 (fr)
GB (1) GB1537478A (fr)
NL (1) NL7416395A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423858A1 (fr) * 1978-04-17 1979-11-16 Philips Nv Microscope electronique muni d'un organe stigmatique

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD134582A1 (de) * 1978-01-19 1979-03-07 Eberhard Hahn Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage
NL183553C (nl) * 1978-05-12 1988-11-16 Philips Nv Inrichting voor het richten van elektrisch geladen deeltjes naar een trefplaats.
NL182924C (nl) * 1978-05-12 1988-06-01 Philips Nv Inrichting voor het implanteren van ionen in een trefplaat.
US4948971A (en) * 1988-11-14 1990-08-14 Amray Inc. Vibration cancellation system for scanning electron microscopes
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
JP3376793B2 (ja) * 1995-12-20 2003-02-10 株式会社日立製作所 走査形電子顕微鏡
JPH10208679A (ja) * 1997-01-27 1998-08-07 Hitachi Ltd 荷電粒子線装置
DE19738070A1 (de) * 1997-09-01 1999-03-04 Leo Elektronenmikroskopie Gmbh Energiefilter, insbesondere für ein Elektronenmikroskop
US6968948B2 (en) * 2003-08-15 2005-11-29 Walter Scott Container for holding live plants for display and sale for a long duration

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3576438A (en) * 1969-04-28 1971-04-27 Bell Telephone Labor Inc Focus monitor for electron microscope including an auxiliary electron gun and focusing lens
NL7012758A (fr) * 1970-08-28 1972-03-01
JPS5126227B2 (fr) * 1971-09-21 1976-08-05
US3872305A (en) * 1972-12-06 1975-03-18 Jeol Ltd Convertible scanning electron microscope
US3927321A (en) * 1974-04-24 1975-12-16 American Optical Corp Electron microscope beam tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423858A1 (fr) * 1978-04-17 1979-11-16 Philips Nv Microscope electronique muni d'un organe stigmatique

Also Published As

Publication number Publication date
US4071765A (en) 1978-01-31
DE2555781C3 (de) 1979-11-08
JPS5185665A (fr) 1976-07-27
FR2295560B1 (fr) 1982-02-26
NL7416395A (nl) 1976-06-21
GB1537478A (en) 1978-12-29
DE2555781A1 (de) 1976-06-24
DE2555781B2 (de) 1979-02-22

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Legal Events

Date Code Title Description
ST Notification of lapse