JPS5185665A - - Google Patents
Info
- Publication number
- JPS5185665A JPS5185665A JP50149047A JP14904775A JPS5185665A JP S5185665 A JPS5185665 A JP S5185665A JP 50149047 A JP50149047 A JP 50149047A JP 14904775 A JP14904775 A JP 14904775A JP S5185665 A JPS5185665 A JP S5185665A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24578—Spatial variables, e.g. position, distance
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7416395A NL7416395A (nl) | 1974-12-17 | 1974-12-17 | Elektronenmikroskoop. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5185665A true JPS5185665A (ja) | 1976-07-27 |
Family
ID=19822658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50149047A Pending JPS5185665A (ja) | 1974-12-17 | 1975-12-13 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4071765A (ja) |
| JP (1) | JPS5185665A (ja) |
| DE (1) | DE2555781C3 (ja) |
| FR (1) | FR2295560A1 (ja) |
| GB (1) | GB1537478A (ja) |
| NL (1) | NL7416395A (ja) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD134582A1 (de) * | 1978-01-19 | 1979-03-07 | Eberhard Hahn | Verfahren und einrichtung zur justierung einer elektronenstrahlbearbeitungsanlage |
| NL7804039A (nl) * | 1978-04-17 | 1979-10-19 | Philips Nv | Elektronenmikroskoop met stigmator. |
| NL183553C (nl) * | 1978-05-12 | 1988-11-16 | Philips Nv | Inrichting voor het richten van elektrisch geladen deeltjes naar een trefplaats. |
| NL182924C (nl) * | 1978-05-12 | 1988-06-01 | Philips Nv | Inrichting voor het implanteren van ionen in een trefplaat. |
| US4948971A (en) * | 1988-11-14 | 1990-08-14 | Amray Inc. | Vibration cancellation system for scanning electron microscopes |
| US5097126A (en) * | 1990-09-25 | 1992-03-17 | Gatan, Inc. | High resolution electron energy loss spectrometer |
| JP3376793B2 (ja) * | 1995-12-20 | 2003-02-10 | 株式会社日立製作所 | 走査形電子顕微鏡 |
| JPH10208679A (ja) * | 1997-01-27 | 1998-08-07 | Hitachi Ltd | 荷電粒子線装置 |
| DE19738070A1 (de) * | 1997-09-01 | 1999-03-04 | Leo Elektronenmikroskopie Gmbh | Energiefilter, insbesondere für ein Elektronenmikroskop |
| US6968948B2 (en) * | 2003-08-15 | 2005-11-29 | Walter Scott | Container for holding live plants for display and sale for a long duration |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3576438A (en) * | 1969-04-28 | 1971-04-27 | Bell Telephone Labor Inc | Focus monitor for electron microscope including an auxiliary electron gun and focusing lens |
| NL7012758A (ja) * | 1970-08-28 | 1972-03-01 | ||
| JPS5126227B2 (ja) * | 1971-09-21 | 1976-08-05 | ||
| US3872305A (en) * | 1972-12-06 | 1975-03-18 | Jeol Ltd | Convertible scanning electron microscope |
| US3927321A (en) * | 1974-04-24 | 1975-12-16 | American Optical Corp | Electron microscope beam tube |
-
1974
- 1974-12-17 NL NL7416395A patent/NL7416395A/xx not_active Application Discontinuation
-
1975
- 1975-12-11 US US05/639,863 patent/US4071765A/en not_active Expired - Lifetime
- 1975-12-11 DE DE2555781A patent/DE2555781C3/de not_active Expired
- 1975-12-12 GB GB50999/75A patent/GB1537478A/en not_active Expired
- 1975-12-13 JP JP50149047A patent/JPS5185665A/ja active Pending
- 1975-12-17 FR FR7538587A patent/FR2295560A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2555781C3 (de) | 1979-11-08 |
| US4071765A (en) | 1978-01-31 |
| FR2295560B1 (ja) | 1982-02-26 |
| DE2555781B2 (de) | 1979-02-22 |
| DE2555781A1 (de) | 1976-06-24 |
| GB1537478A (en) | 1978-12-29 |
| FR2295560A1 (fr) | 1976-07-16 |
| NL7416395A (nl) | 1976-06-21 |