GB2019086A - Electron Microscope Including a Stigmator - Google Patents

Electron Microscope Including a Stigmator

Info

Publication number
GB2019086A
GB2019086A GB7912910A GB7912910A GB2019086A GB 2019086 A GB2019086 A GB 2019086A GB 7912910 A GB7912910 A GB 7912910A GB 7912910 A GB7912910 A GB 7912910A GB 2019086 A GB2019086 A GB 2019086A
Authority
GB
United Kingdom
Prior art keywords
stigmator
electron microscope
microscope including
mirror
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB7912910A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB2019086A publication Critical patent/GB2019086A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB7912910A 1978-04-17 1979-04-12 Electron Microscope Including a Stigmator Withdrawn GB2019086A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804039A NL7804039A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met stigmator.

Publications (1)

Publication Number Publication Date
GB2019086A true GB2019086A (en) 1979-10-24

Family

ID=19830666

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7912910A Withdrawn GB2019086A (en) 1978-04-17 1979-04-12 Electron Microscope Including a Stigmator

Country Status (5)

Country Link
JP (1) JPS54139459A (nl)
DE (1) DE2915207A1 (nl)
FR (1) FR2423858A1 (nl)
GB (1) GB2019086A (nl)
NL (1) NL7804039A (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901980C2 (de) * 1989-01-24 2001-06-28 Ceos Gmbh Multipolelement und Verfahren zur Herstellung eines Multipolelements

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521869B2 (nl) * 1972-07-11 1977-01-18
NL7416395A (nl) * 1974-12-17 1976-06-21 Philips Nv Elektronenmikroskoop.
DE2515550C2 (de) * 1975-04-09 1977-05-18 Siemens Ag Korpuskularstrahloptisches geraet zur abbildung einer maske auf ein zu bestrahlendes praeparat
DE2542356C2 (de) * 1975-09-19 1977-10-20 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Fokussierung der Objektivlinse eines Korpuskular-Durchstrahlungs-Rastermikroskops und Einrichtung zur selbsttätigen Durchführung des Verfahrens, sowie Anwendung

Also Published As

Publication number Publication date
JPS54139459A (en) 1979-10-29
DE2915207A1 (de) 1979-10-25
FR2423858A1 (fr) 1979-11-16
NL7804039A (nl) 1979-10-19

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)