JPS5218184A - Semiconductor device process - Google Patents

Semiconductor device process

Info

Publication number
JPS5218184A
JPS5218184A JP50094329A JP9432975A JPS5218184A JP S5218184 A JPS5218184 A JP S5218184A JP 50094329 A JP50094329 A JP 50094329A JP 9432975 A JP9432975 A JP 9432975A JP S5218184 A JPS5218184 A JP S5218184A
Authority
JP
Japan
Prior art keywords
semiconductor device
device process
sio
chip area
polycrystal silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50094329A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5613027B2 (en, 2012
Inventor
Tsutomu Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50094329A priority Critical patent/JPS5218184A/ja
Publication of JPS5218184A publication Critical patent/JPS5218184A/ja
Publication of JPS5613027B2 publication Critical patent/JPS5613027B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP50094329A 1975-08-01 1975-08-01 Semiconductor device process Granted JPS5218184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50094329A JPS5218184A (en) 1975-08-01 1975-08-01 Semiconductor device process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50094329A JPS5218184A (en) 1975-08-01 1975-08-01 Semiconductor device process

Publications (2)

Publication Number Publication Date
JPS5218184A true JPS5218184A (en) 1977-02-10
JPS5613027B2 JPS5613027B2 (en, 2012) 1981-03-25

Family

ID=14107228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50094329A Granted JPS5218184A (en) 1975-08-01 1975-08-01 Semiconductor device process

Country Status (1)

Country Link
JP (1) JPS5218184A (en, 2012)

Also Published As

Publication number Publication date
JPS5613027B2 (en, 2012) 1981-03-25

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