JPS52150982A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52150982A
JPS52150982A JP6830176A JP6830176A JPS52150982A JP S52150982 A JPS52150982 A JP S52150982A JP 6830176 A JP6830176 A JP 6830176A JP 6830176 A JP6830176 A JP 6830176A JP S52150982 A JPS52150982 A JP S52150982A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
regions
pitch
allowances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6830176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619740B2 (enExample
Inventor
Mikio Takagi
Hajime Kamioka
Akira Fujinuma
Shuichi Miyamoto
Minoru Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6830176A priority Critical patent/JPS52150982A/ja
Publication of JPS52150982A publication Critical patent/JPS52150982A/ja
Publication of JPS5619740B2 publication Critical patent/JPS5619740B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP6830176A 1976-06-10 1976-06-10 Production of semiconductor device Granted JPS52150982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6830176A JPS52150982A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6830176A JPS52150982A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52150982A true JPS52150982A (en) 1977-12-15
JPS5619740B2 JPS5619740B2 (enExample) 1981-05-09

Family

ID=13369816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6830176A Granted JPS52150982A (en) 1976-06-10 1976-06-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52150982A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494885A (en) * 1977-12-30 1979-07-26 Ibm Method of fabricating ic semiconductor
JPS54143074A (en) * 1978-04-28 1979-11-07 Ibm Method of forming mask

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494885A (en) * 1977-12-30 1979-07-26 Ibm Method of fabricating ic semiconductor
JPS54143074A (en) * 1978-04-28 1979-11-07 Ibm Method of forming mask

Also Published As

Publication number Publication date
JPS5619740B2 (enExample) 1981-05-09

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