JPS52150982A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52150982A JPS52150982A JP6830176A JP6830176A JPS52150982A JP S52150982 A JPS52150982 A JP S52150982A JP 6830176 A JP6830176 A JP 6830176A JP 6830176 A JP6830176 A JP 6830176A JP S52150982 A JPS52150982 A JP S52150982A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- regions
- pitch
- allowances
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To eliminate deviation, reduce pitch allowances and increase the scale of integration by restricting, up to the last, the pitch of the collector contact regions, base regions and resistance regions with the pattern formed in a first photo resist film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6830176A JPS52150982A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6830176A JPS52150982A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52150982A true JPS52150982A (en) | 1977-12-15 |
JPS5619740B2 JPS5619740B2 (en) | 1981-05-09 |
Family
ID=13369816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6830176A Granted JPS52150982A (en) | 1976-06-10 | 1976-06-10 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52150982A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5494885A (en) * | 1977-12-30 | 1979-07-26 | Ibm | Method of fabricating ic semiconductor |
JPS54143074A (en) * | 1978-04-28 | 1979-11-07 | Ibm | Method of forming mask |
-
1976
- 1976-06-10 JP JP6830176A patent/JPS52150982A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5494885A (en) * | 1977-12-30 | 1979-07-26 | Ibm | Method of fabricating ic semiconductor |
JPS54143074A (en) * | 1978-04-28 | 1979-11-07 | Ibm | Method of forming mask |
Also Published As
Publication number | Publication date |
---|---|
JPS5619740B2 (en) | 1981-05-09 |
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