JPS52146553A - Carbon boat for liquid phase epitaxial growth - Google Patents

Carbon boat for liquid phase epitaxial growth

Info

Publication number
JPS52146553A
JPS52146553A JP6242876A JP6242876A JPS52146553A JP S52146553 A JPS52146553 A JP S52146553A JP 6242876 A JP6242876 A JP 6242876A JP 6242876 A JP6242876 A JP 6242876A JP S52146553 A JPS52146553 A JP S52146553A
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
solution
phase epitaxial
carbon boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6242876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5510969B2 (enExample
Inventor
Takashi Fukui
Yoshiharu Horikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP6242876A priority Critical patent/JPS52146553A/ja
Publication of JPS52146553A publication Critical patent/JPS52146553A/ja
Publication of JPS5510969B2 publication Critical patent/JPS5510969B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
JP6242876A 1976-05-31 1976-05-31 Carbon boat for liquid phase epitaxial growth Granted JPS52146553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6242876A JPS52146553A (en) 1976-05-31 1976-05-31 Carbon boat for liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6242876A JPS52146553A (en) 1976-05-31 1976-05-31 Carbon boat for liquid phase epitaxial growth

Publications (2)

Publication Number Publication Date
JPS52146553A true JPS52146553A (en) 1977-12-06
JPS5510969B2 JPS5510969B2 (enExample) 1980-03-21

Family

ID=13199874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6242876A Granted JPS52146553A (en) 1976-05-31 1976-05-31 Carbon boat for liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS52146553A (enExample)

Also Published As

Publication number Publication date
JPS5510969B2 (enExample) 1980-03-21

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