JPS52144287A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS52144287A JPS52144287A JP6061176A JP6061176A JPS52144287A JP S52144287 A JPS52144287 A JP S52144287A JP 6061176 A JP6061176 A JP 6061176A JP 6061176 A JP6061176 A JP 6061176A JP S52144287 A JPS52144287 A JP S52144287A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- semiconductor device
- mos
- mask
- depth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: In producing the C - MOS,IC, it is intended to prevent impurities from percolating out to an active zone and control positively the depth of a peak value of an impurity concentration by using first and second substance layers providing an oxide film and a mask for injecting ions on a semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51060611A JPS5915177B2 (en) | 1976-05-27 | 1976-05-27 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51060611A JPS5915177B2 (en) | 1976-05-27 | 1976-05-27 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52144287A true JPS52144287A (en) | 1977-12-01 |
JPS5915177B2 JPS5915177B2 (en) | 1984-04-07 |
Family
ID=13147223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51060611A Expired JPS5915177B2 (en) | 1976-05-27 | 1976-05-27 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5915177B2 (en) |
-
1976
- 1976-05-27 JP JP51060611A patent/JPS5915177B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5915177B2 (en) | 1984-04-07 |
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