JPS52139367A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52139367A
JPS52139367A JP5689176A JP5689176A JPS52139367A JP S52139367 A JPS52139367 A JP S52139367A JP 5689176 A JP5689176 A JP 5689176A JP 5689176 A JP5689176 A JP 5689176A JP S52139367 A JPS52139367 A JP S52139367A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
ohmic contact
semiconductor
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5689176A
Other languages
Japanese (ja)
Inventor
Toshio Sugawa
Takeshi Konuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5689176A priority Critical patent/JPS52139367A/en
Publication of JPS52139367A publication Critical patent/JPS52139367A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form good ohmic contact by ion implanting more than one structural components and making heat treatment in the case of metals or alloys forming ohmic contact beforehand within a semiconductor.
COPYRIGHT: (C)1977,JPO&Japio
JP5689176A 1976-05-17 1976-05-17 Production of semiconductor device Pending JPS52139367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5689176A JPS52139367A (en) 1976-05-17 1976-05-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5689176A JPS52139367A (en) 1976-05-17 1976-05-17 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52139367A true JPS52139367A (en) 1977-11-21

Family

ID=13040043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5689176A Pending JPS52139367A (en) 1976-05-17 1976-05-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52139367A (en)

Similar Documents

Publication Publication Date Title
JPS53148389A (en) Manufacture for semiconductor device
JPS5238885A (en) Method for production of semiconductor device
JPS53115187A (en) Semiconductor device
JPS52139367A (en) Production of semiconductor device
JPS51150986A (en) Fabrication method of semiconductor device
JPS53147481A (en) Semiconductor device and production of the same
JPS52117066A (en) Semiconductor device
JPS5233143A (en) Compressive molten bath method by industive heat way
JPS51151069A (en) Electrode forming method of a semiconductor element
JPS523524A (en) Cu alloy of high strength and electric conductivity
JPS52153383A (en) Preparation of semiconductor device
JPS546461A (en) Manufacture of semiconductor device
JPS5381067A (en) Production of semiconductor device
JPS51126762A (en) Integrated circuit manufacturing process
JPS5225000A (en) Method for production of feb powder
JPS5422776A (en) Manufacture of semiconductor device
JPS52154343A (en) Production of semiconductor device
JPS5363866A (en) Production of semiconductor device
JPS5313883A (en) Semiconductor device and its production
JPS51112268A (en) Semiconductor device and its production method
JPS5296878A (en) Manufacture of semiconductor laser element
JPS5361980A (en) Production of semiconductor device
JPS538057A (en) Production of semiconductor device
JPS51147958A (en) Method for forming metal electrode
JPS5375758A (en) Heat processing method of semiconductor device