JPS52137976A - Liquid phase vapor growth apparatus for compound semiconductors - Google Patents

Liquid phase vapor growth apparatus for compound semiconductors

Info

Publication number
JPS52137976A
JPS52137976A JP5485176A JP5485176A JPS52137976A JP S52137976 A JPS52137976 A JP S52137976A JP 5485176 A JP5485176 A JP 5485176A JP 5485176 A JP5485176 A JP 5485176A JP S52137976 A JPS52137976 A JP S52137976A
Authority
JP
Japan
Prior art keywords
liquid phase
growth apparatus
compound semiconductors
vapor growth
phase vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5485176A
Other languages
English (en)
Inventor
Makoto Naito
Masaru Kawachi
Tadashi Komatsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5485176A priority Critical patent/JPS52137976A/ja
Publication of JPS52137976A publication Critical patent/JPS52137976A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5485176A 1976-05-14 1976-05-14 Liquid phase vapor growth apparatus for compound semiconductors Pending JPS52137976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5485176A JPS52137976A (en) 1976-05-14 1976-05-14 Liquid phase vapor growth apparatus for compound semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5485176A JPS52137976A (en) 1976-05-14 1976-05-14 Liquid phase vapor growth apparatus for compound semiconductors

Publications (1)

Publication Number Publication Date
JPS52137976A true JPS52137976A (en) 1977-11-17

Family

ID=12982091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5485176A Pending JPS52137976A (en) 1976-05-14 1976-05-14 Liquid phase vapor growth apparatus for compound semiconductors

Country Status (1)

Country Link
JP (1) JPS52137976A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111214A (en) * 1980-02-07 1981-09-02 Nippon Telegr & Teleph Corp <Ntt> Carbon slider boat apparatus for liquid phase epitaxial growth

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49116960A (ja) * 1973-03-09 1974-11-08
JPS49121480A (ja) * 1973-03-20 1974-11-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49116960A (ja) * 1973-03-09 1974-11-08
JPS49121480A (ja) * 1973-03-20 1974-11-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111214A (en) * 1980-02-07 1981-09-02 Nippon Telegr & Teleph Corp <Ntt> Carbon slider boat apparatus for liquid phase epitaxial growth

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