JPS49116960A - - Google Patents

Info

Publication number
JPS49116960A
JPS49116960A JP2712773A JP2712773A JPS49116960A JP S49116960 A JPS49116960 A JP S49116960A JP 2712773 A JP2712773 A JP 2712773A JP 2712773 A JP2712773 A JP 2712773A JP S49116960 A JPS49116960 A JP S49116960A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2712773A
Other versions
JPS5329428B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2712773A priority Critical patent/JPS5329428B2/ja
Publication of JPS49116960A publication Critical patent/JPS49116960A/ja
Priority to US05/594,950 priority patent/US4033291A/en
Publication of JPS5329428B2 publication Critical patent/JPS5329428B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
JP2712773A 1973-03-09 1973-03-09 Expired JPS5329428B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2712773A JPS5329428B2 (ja) 1973-03-09 1973-03-09
US05/594,950 US4033291A (en) 1973-03-09 1975-07-10 Apparatus for liquid-phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2712773A JPS5329428B2 (ja) 1973-03-09 1973-03-09

Publications (2)

Publication Number Publication Date
JPS49116960A true JPS49116960A (ja) 1974-11-08
JPS5329428B2 JPS5329428B2 (ja) 1978-08-21

Family

ID=12212380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2712773A Expired JPS5329428B2 (ja) 1973-03-09 1973-03-09

Country Status (1)

Country Link
JP (1) JPS5329428B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52137976A (en) * 1976-05-14 1977-11-17 Toshiba Corp Liquid phase vapor growth apparatus for compound semiconductors
JPS52142479A (en) * 1976-05-21 1977-11-28 Stanley Electric Co Ltd Method of making semiconductor
JPS52142480A (en) * 1976-05-21 1977-11-28 Stanley Electric Co Ltd Liquiddgrowth method
JPS5488069A (en) * 1977-12-26 1979-07-12 Fujitsu Ltd Liquid-phase epitaxial growth unit
JPS5821830A (ja) * 1981-07-31 1983-02-08 Fujitsu Ltd 液相エピタキシヤル成長装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55177482U (ja) * 1979-06-05 1980-12-19

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52137976A (en) * 1976-05-14 1977-11-17 Toshiba Corp Liquid phase vapor growth apparatus for compound semiconductors
JPS52142479A (en) * 1976-05-21 1977-11-28 Stanley Electric Co Ltd Method of making semiconductor
JPS52142480A (en) * 1976-05-21 1977-11-28 Stanley Electric Co Ltd Liquiddgrowth method
JPS5513576B2 (ja) * 1976-05-21 1980-04-10
JPS5513577B2 (ja) * 1976-05-21 1980-04-10
JPS5488069A (en) * 1977-12-26 1979-07-12 Fujitsu Ltd Liquid-phase epitaxial growth unit
JPS5821830A (ja) * 1981-07-31 1983-02-08 Fujitsu Ltd 液相エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPS5329428B2 (ja) 1978-08-21

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