JPS52137978A - Liquid phase growth apparatus of semiconductors - Google Patents
Liquid phase growth apparatus of semiconductorsInfo
- Publication number
- JPS52137978A JPS52137978A JP5485376A JP5485376A JPS52137978A JP S52137978 A JPS52137978 A JP S52137978A JP 5485376 A JP5485376 A JP 5485376A JP 5485376 A JP5485376 A JP 5485376A JP S52137978 A JPS52137978 A JP S52137978A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- phase growth
- semiconductors
- growth apparatus
- sliding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE: To perform liquid phase growth voluminously by matching the holes provided to a sliding plate on the bottom of a solution reservoir by operating the sliding plate from the outside thus allowing solution to enter a wafer accommodating chamber.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5485376A JPS52137978A (en) | 1976-05-14 | 1976-05-14 | Liquid phase growth apparatus of semiconductors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5485376A JPS52137978A (en) | 1976-05-14 | 1976-05-14 | Liquid phase growth apparatus of semiconductors |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52137978A true JPS52137978A (en) | 1977-11-17 |
JPS5532212B2 JPS5532212B2 (en) | 1980-08-23 |
Family
ID=12982140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5485376A Granted JPS52137978A (en) | 1976-05-14 | 1976-05-14 | Liquid phase growth apparatus of semiconductors |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52137978A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49121462U (en) * | 1973-02-16 | 1974-10-17 | ||
JPS50156361A (en) * | 1974-06-04 | 1975-12-17 | ||
US3933123A (en) * | 1971-07-13 | 1976-01-20 | U.S. Philips Corporation | Liquid phase epitaxy |
-
1976
- 1976-05-14 JP JP5485376A patent/JPS52137978A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3933123A (en) * | 1971-07-13 | 1976-01-20 | U.S. Philips Corporation | Liquid phase epitaxy |
JPS49121462U (en) * | 1973-02-16 | 1974-10-17 | ||
JPS50156361A (en) * | 1974-06-04 | 1975-12-17 |
Also Published As
Publication number | Publication date |
---|---|
JPS5532212B2 (en) | 1980-08-23 |
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