JPS52130294A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52130294A
JPS52130294A JP4610876A JP4610876A JPS52130294A JP S52130294 A JPS52130294 A JP S52130294A JP 4610876 A JP4610876 A JP 4610876A JP 4610876 A JP4610876 A JP 4610876A JP S52130294 A JPS52130294 A JP S52130294A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
treatment
volume
beforehand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4610876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5625033B2 (cg-RX-API-DMAC7.html
Inventor
Masayasu Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4610876A priority Critical patent/JPS52130294A/ja
Publication of JPS52130294A publication Critical patent/JPS52130294A/ja
Publication of JPS5625033B2 publication Critical patent/JPS5625033B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Led Devices (AREA)
JP4610876A 1976-04-24 1976-04-24 Production of semiconductor device Granted JPS52130294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4610876A JPS52130294A (en) 1976-04-24 1976-04-24 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4610876A JPS52130294A (en) 1976-04-24 1976-04-24 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52130294A true JPS52130294A (en) 1977-11-01
JPS5625033B2 JPS5625033B2 (cg-RX-API-DMAC7.html) 1981-06-10

Family

ID=12737785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4610876A Granted JPS52130294A (en) 1976-04-24 1976-04-24 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52130294A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04216683A (ja) * 1990-12-17 1992-08-06 Shin Etsu Handotai Co Ltd 発光素子の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984385A (cg-RX-API-DMAC7.html) * 1972-12-18 1974-08-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984385A (cg-RX-API-DMAC7.html) * 1972-12-18 1974-08-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04216683A (ja) * 1990-12-17 1992-08-06 Shin Etsu Handotai Co Ltd 発光素子の製造方法

Also Published As

Publication number Publication date
JPS5625033B2 (cg-RX-API-DMAC7.html) 1981-06-10

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