JPS52130288A - Patterning method - Google Patents

Patterning method

Info

Publication number
JPS52130288A
JPS52130288A JP4658776A JP4658776A JPS52130288A JP S52130288 A JPS52130288 A JP S52130288A JP 4658776 A JP4658776 A JP 4658776A JP 4658776 A JP4658776 A JP 4658776A JP S52130288 A JPS52130288 A JP S52130288A
Authority
JP
Japan
Prior art keywords
patterning method
less
hindrances
patters
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4658776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153849B2 (cs
Inventor
Norikazu Tsumita
Masaki Takahashi
Hideki Nishida
Koji Yamada
Yutaka Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4658776A priority Critical patent/JPS52130288A/ja
Publication of JPS52130288A publication Critical patent/JPS52130288A/ja
Publication of JPS6153849B2 publication Critical patent/JPS6153849B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4658776A 1976-04-26 1976-04-26 Patterning method Granted JPS52130288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4658776A JPS52130288A (en) 1976-04-26 1976-04-26 Patterning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4658776A JPS52130288A (en) 1976-04-26 1976-04-26 Patterning method

Publications (2)

Publication Number Publication Date
JPS52130288A true JPS52130288A (en) 1977-11-01
JPS6153849B2 JPS6153849B2 (cs) 1986-11-19

Family

ID=12751418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4658776A Granted JPS52130288A (en) 1976-04-26 1976-04-26 Patterning method

Country Status (1)

Country Link
JP (1) JPS52130288A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554937A (en) * 1978-06-27 1980-01-14 Fujitsu Ltd Dry etching method
JPS6042832A (ja) * 1983-08-18 1985-03-07 Matsushita Electric Ind Co Ltd イオンビ−ム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554937A (en) * 1978-06-27 1980-01-14 Fujitsu Ltd Dry etching method
JPS6042832A (ja) * 1983-08-18 1985-03-07 Matsushita Electric Ind Co Ltd イオンビ−ム装置

Also Published As

Publication number Publication date
JPS6153849B2 (cs) 1986-11-19

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