JPS52124483A - Gas phase growth regulation apparatus - Google Patents

Gas phase growth regulation apparatus

Info

Publication number
JPS52124483A
JPS52124483A JP4127276A JP4127276A JPS52124483A JP S52124483 A JPS52124483 A JP S52124483A JP 4127276 A JP4127276 A JP 4127276A JP 4127276 A JP4127276 A JP 4127276A JP S52124483 A JPS52124483 A JP S52124483A
Authority
JP
Japan
Prior art keywords
gas phase
phase growth
growth regulation
regulation apparatus
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4127276A
Other languages
Japanese (ja)
Inventor
Katsuo Sugawara
Takeo Yoshimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4127276A priority Critical patent/JPS52124483A/en
Publication of JPS52124483A publication Critical patent/JPS52124483A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Abstract

PURPOSE:To regulate the thickness of the film with a high accuracy, by receiving the light from a sheet of semiconductive wafer, being situated other than both end and measuring the thickness of the film.
JP4127276A 1976-04-14 1976-04-14 Gas phase growth regulation apparatus Pending JPS52124483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4127276A JPS52124483A (en) 1976-04-14 1976-04-14 Gas phase growth regulation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4127276A JPS52124483A (en) 1976-04-14 1976-04-14 Gas phase growth regulation apparatus

Publications (1)

Publication Number Publication Date
JPS52124483A true JPS52124483A (en) 1977-10-19

Family

ID=12603794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4127276A Pending JPS52124483A (en) 1976-04-14 1976-04-14 Gas phase growth regulation apparatus

Country Status (1)

Country Link
JP (1) JPS52124483A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873642U (en) * 1981-11-13 1983-05-18 クラリオン株式会社 Memory-slide support mechanism in push-button tuner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873642U (en) * 1981-11-13 1983-05-18 クラリオン株式会社 Memory-slide support mechanism in push-button tuner

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