JPS52116171A - Manufacture of hard mask - Google Patents

Manufacture of hard mask

Info

Publication number
JPS52116171A
JPS52116171A JP3256676A JP3256676A JPS52116171A JP S52116171 A JPS52116171 A JP S52116171A JP 3256676 A JP3256676 A JP 3256676A JP 3256676 A JP3256676 A JP 3256676A JP S52116171 A JPS52116171 A JP S52116171A
Authority
JP
Japan
Prior art keywords
hard mask
thin film
manufacture
metal thin
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3256676A
Other languages
Japanese (ja)
Inventor
Tadao Kachi
Michio Hirai
Akio Hayasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3256676A priority Critical patent/JPS52116171A/en
Publication of JPS52116171A publication Critical patent/JPS52116171A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To form grooves by having ion etching using metal thin film on the surface of substrate constituting hard mask for the mask in order to recoat the metal thin film to remove the thin film within the groove through anode oxidation. As a result, the unusable hard mask can be used again.
COPYRIGHT: (C)1977,JPO&Japio
JP3256676A 1976-03-26 1976-03-26 Manufacture of hard mask Pending JPS52116171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3256676A JPS52116171A (en) 1976-03-26 1976-03-26 Manufacture of hard mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3256676A JPS52116171A (en) 1976-03-26 1976-03-26 Manufacture of hard mask

Publications (1)

Publication Number Publication Date
JPS52116171A true JPS52116171A (en) 1977-09-29

Family

ID=12362448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3256676A Pending JPS52116171A (en) 1976-03-26 1976-03-26 Manufacture of hard mask

Country Status (1)

Country Link
JP (1) JPS52116171A (en)

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