JPS51147483A - An evaporating apparatus - Google Patents

An evaporating apparatus

Info

Publication number
JPS51147483A
JPS51147483A JP7158075A JP7158075A JPS51147483A JP S51147483 A JPS51147483 A JP S51147483A JP 7158075 A JP7158075 A JP 7158075A JP 7158075 A JP7158075 A JP 7158075A JP S51147483 A JPS51147483 A JP S51147483A
Authority
JP
Japan
Prior art keywords
evaporating apparatus
evacuation
batch
substrates
large number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7158075A
Other languages
Japanese (ja)
Inventor
Tatsuhiko Miyazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7158075A priority Critical patent/JPS51147483A/en
Publication of JPS51147483A publication Critical patent/JPS51147483A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:A batch-type evaporating apparatus wherein an evaporated film of a uniform thickness can be formed on a large number of substrates by one evacuation.
JP7158075A 1975-06-12 1975-06-12 An evaporating apparatus Pending JPS51147483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7158075A JPS51147483A (en) 1975-06-12 1975-06-12 An evaporating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7158075A JPS51147483A (en) 1975-06-12 1975-06-12 An evaporating apparatus

Publications (1)

Publication Number Publication Date
JPS51147483A true JPS51147483A (en) 1976-12-17

Family

ID=13464768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7158075A Pending JPS51147483A (en) 1975-06-12 1975-06-12 An evaporating apparatus

Country Status (1)

Country Link
JP (1) JPS51147483A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102650040A (en) * 2011-02-23 2012-08-29 三星电子株式会社 Surface coating method and device for exterior part

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102650040A (en) * 2011-02-23 2012-08-29 三星电子株式会社 Surface coating method and device for exterior part
EP2492367A1 (en) * 2011-02-23 2012-08-29 Samsung Electronics Co., Ltd. Surface coating method and device for exterior part

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