JPS5210867A - Apparatus for forming films in vacuum - Google Patents

Apparatus for forming films in vacuum

Info

Publication number
JPS5210867A
JPS5210867A JP8686075A JP8686075A JPS5210867A JP S5210867 A JPS5210867 A JP S5210867A JP 8686075 A JP8686075 A JP 8686075A JP 8686075 A JP8686075 A JP 8686075A JP S5210867 A JPS5210867 A JP S5210867A
Authority
JP
Japan
Prior art keywords
vacuum
forming films
films
forming
apparatus capable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8686075A
Other languages
Japanese (ja)
Inventor
Yasuhiro Shimizu
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8686075A priority Critical patent/JPS5210867A/en
Publication of JPS5210867A publication Critical patent/JPS5210867A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:An ion plating apparatus capable of forming films without containing impurities.
JP8686075A 1975-07-15 1975-07-15 Apparatus for forming films in vacuum Pending JPS5210867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8686075A JPS5210867A (en) 1975-07-15 1975-07-15 Apparatus for forming films in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8686075A JPS5210867A (en) 1975-07-15 1975-07-15 Apparatus for forming films in vacuum

Publications (1)

Publication Number Publication Date
JPS5210867A true JPS5210867A (en) 1977-01-27

Family

ID=13898555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8686075A Pending JPS5210867A (en) 1975-07-15 1975-07-15 Apparatus for forming films in vacuum

Country Status (1)

Country Link
JP (1) JPS5210867A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544509A (en) * 1978-09-22 1980-03-28 Ulvac Corp Vacuum apparatus part coated with metallic nitride
JPS55102178U (en) * 1979-01-11 1980-07-16
JPS5629571A (en) * 1979-08-01 1981-03-24 Pfw Bv Manufacture of 11crotonoyll2*6*66trimethylcyclohexaa1* 33dione

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913702A (en) * 1972-05-17 1974-02-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913702A (en) * 1972-05-17 1974-02-06

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544509A (en) * 1978-09-22 1980-03-28 Ulvac Corp Vacuum apparatus part coated with metallic nitride
JPS5832229B2 (en) * 1978-09-22 1983-07-12 日本真空技術株式会社 Vacuum containers and vacuum equipment parts coated with metal nitride
JPS55102178U (en) * 1979-01-11 1980-07-16
JPS5629571A (en) * 1979-08-01 1981-03-24 Pfw Bv Manufacture of 11crotonoyll2*6*66trimethylcyclohexaa1* 33dione
JPH02165A (en) * 1979-08-01 1990-01-05 Pfw Nederland Bv Preparation of 1-crotonoyl-2,6,6- trimethylcyclohexa-1,3-diene
JPH0442381B2 (en) * 1979-08-01 1992-07-13 Pii Efu Bee Neederu* Bv

Similar Documents

Publication Publication Date Title
JPS5229879A (en) Process for processing disposed polymer mixture
JPS5276279A (en) Apparatus for vacuum treatment
YU209676A (en) Process for the separation of proteins by means of ion exchange
AU503949B2 (en) Apparatus for ion nitriding
CA1003358A (en) Process for separating components from ethanolamine mixtures
JPS5250685A (en) Apparatus for dividing wafers
PT65972B (en) Process for producing an organomagnesium complex
AU508078B2 (en) Apparatus for separating parts
JPS5210867A (en) Apparatus for forming films in vacuum
JPS5239584A (en) Vacuum evaporation apparatus
AU498915B2 (en) Apparatus & method for processing cassette contained filmstrips
JPS51132132A (en) Apparatus for electrolytic processing
JPS525684A (en) Indicator
JPS5213904A (en) Method of processing typographic plate
JPS5275985A (en) Apparatus for plasma treatment at low tempebature
IL55696A0 (en) Appartus for processing an electrical appartus
JPS526447A (en) Film material for radome
JPS5226882A (en) Apparatus for direct measurement of substrate temperatures
IE43781L (en) Apparatus for viewing film slides
JPS51117986A (en) Sputtering apparatus
JPS51117033A (en) Photograph processing method
JPS5224990A (en) Ionized vapor forming appratus
JPS5244736A (en) Partial ion plating apparatus
JPS5248960A (en) Apparatus for activating cathode of cathodeerayytube
JPS51146578A (en) Apparatus for processing disposed film