JPS5544509A - Vacuum apparatus part coated with metallic nitride - Google Patents

Vacuum apparatus part coated with metallic nitride

Info

Publication number
JPS5544509A
JPS5544509A JP11586378A JP11586378A JPS5544509A JP S5544509 A JPS5544509 A JP S5544509A JP 11586378 A JP11586378 A JP 11586378A JP 11586378 A JP11586378 A JP 11586378A JP S5544509 A JPS5544509 A JP S5544509A
Authority
JP
Japan
Prior art keywords
vacuum
vacuum apparatus
coating
vessel
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11586378A
Other languages
Japanese (ja)
Other versions
JPS5832229B2 (en
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP53115863A priority Critical patent/JPS5832229B2/en
Priority to DE19792900057 priority patent/DE2900057C3/en
Priority to CH19579A priority patent/CH646072A5/en
Priority to FR7901177A priority patent/FR2436625A1/en
Publication of JPS5544509A publication Critical patent/JPS5544509A/en
Publication of JPS5832229B2 publication Critical patent/JPS5832229B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
    • B01J2219/0236—Metal based

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)

Abstract

PURPOSE: To prevent the release of impurities from a vacuum apparatus etc. and to decrease the speed of a vacuum pump required to produce a given vacuum, by coating the surface of a vacuum vessel or parts for a vacuum apparatus with nitride of a metal e.g., B, Al, Si, or Ti etc. by reactive evaporation.
CONSTITUTION: The surface of a vacuum vessel or vacuum apparatus parts made of stainless steel etc. is coated with a nitride of a metal, e.g., B, Al, Si, Ti, Zr etc, by reactive evaporation. The coating is chemically stable, the surface is very smooth, and the quantity of gas adsorbed on the surface is very small. In addn., the coating is high in hardness, corrosion resistance, and heat resistance, so that it is hardly flawed. Use of the vessel or parts made by this method makes vacuum operations or treatment easy, and decreases the speed of a vacuum pump required to produce the same high vacuum to 1/2W1/3.
COPYRIGHT: (C)1980,JPO&Japio
JP53115863A 1978-09-22 1978-09-22 Vacuum containers and vacuum equipment parts coated with metal nitride Expired JPS5832229B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP53115863A JPS5832229B2 (en) 1978-09-22 1978-09-22 Vacuum containers and vacuum equipment parts coated with metal nitride
DE19792900057 DE2900057C3 (en) 1978-09-22 1979-01-02 Vacuum container
CH19579A CH646072A5 (en) 1978-09-22 1979-01-09 Method for reducing the amount of gas absorbed on a metallic surface
FR7901177A FR2436625A1 (en) 1978-09-22 1979-01-10 VACUUM CONTAINER AND OTHER VACUUM EQUIPMENT PARTS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53115863A JPS5832229B2 (en) 1978-09-22 1978-09-22 Vacuum containers and vacuum equipment parts coated with metal nitride

Publications (2)

Publication Number Publication Date
JPS5544509A true JPS5544509A (en) 1980-03-28
JPS5832229B2 JPS5832229B2 (en) 1983-07-12

Family

ID=14673005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53115863A Expired JPS5832229B2 (en) 1978-09-22 1978-09-22 Vacuum containers and vacuum equipment parts coated with metal nitride

Country Status (4)

Country Link
JP (1) JPS5832229B2 (en)
CH (1) CH646072A5 (en)
DE (1) DE2900057C3 (en)
FR (1) FR2436625A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006009038A (en) * 2003-06-10 2006-01-12 Shinku Jikkenshitsu:Kk Material for parts in vacuum apparatus, parts in vacuum apparatus, vacuum apparatus, method for manufacturing material for parts in vacuum apparatus, method for treating parts in vacuum apparatus, and treatment method in vacuum apparatus
JP2017503078A (en) * 2013-12-30 2017-01-26 ジーティーエイティー・コーポレーション Improved radiation shielding for CVD reactors.

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5684789A (en) * 1979-12-13 1981-07-10 Toyo Eng Corp High-temperature treatment of hydrocarbon-containing material
JPS6055877U (en) * 1983-09-26 1985-04-19 株式会社タニタ fire starter crater
US5478524A (en) * 1992-08-24 1995-12-26 Nissan Motor Co., Ltd. Super high vacuum vessel
US6451181B1 (en) 1999-03-02 2002-09-17 Motorola, Inc. Method of forming a semiconductor device barrier layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834912A (en) * 1971-09-09 1973-05-23
JPS5210867A (en) * 1975-07-15 1977-01-27 Matsushita Electric Ind Co Ltd Apparatus for forming films in vacuum

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7120919U (en) * 1971-08-26 Rhone Poulenc Sa Laboratory autoclave made of glazed steel
FR1405264A (en) * 1964-05-12 1965-07-09 Commissariat Energie Atomique Manufacturing process of vacuum chambers
US3537891A (en) * 1967-09-25 1970-11-03 Gen Electric Resistor films of transition metal nitrides and method of forming
US3540926A (en) * 1968-10-09 1970-11-17 Gen Electric Nitride insulating films deposited by reactive evaporation
US3833430A (en) * 1972-12-26 1974-09-03 Varian Associates Treatment of stainless steel and similar alloys to reduce hydrogen outgassing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834912A (en) * 1971-09-09 1973-05-23
JPS5210867A (en) * 1975-07-15 1977-01-27 Matsushita Electric Ind Co Ltd Apparatus for forming films in vacuum

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006009038A (en) * 2003-06-10 2006-01-12 Shinku Jikkenshitsu:Kk Material for parts in vacuum apparatus, parts in vacuum apparatus, vacuum apparatus, method for manufacturing material for parts in vacuum apparatus, method for treating parts in vacuum apparatus, and treatment method in vacuum apparatus
JP2017503078A (en) * 2013-12-30 2017-01-26 ジーティーエイティー・コーポレーション Improved radiation shielding for CVD reactors.
JP2019060025A (en) * 2013-12-30 2019-04-18 ジーティーエイティー・コーポレーション Improved radiation shielding for cvd reactor
US11015244B2 (en) 2013-12-30 2021-05-25 Advanced Material Solutions, Llc Radiation shielding for a CVD reactor

Also Published As

Publication number Publication date
JPS5832229B2 (en) 1983-07-12
CH646072A5 (en) 1984-11-15
DE2900057A1 (en) 1980-03-27
FR2436625B1 (en) 1983-07-29
DE2900057B2 (en) 1980-11-27
DE2900057C3 (en) 1981-10-08
FR2436625A1 (en) 1980-04-18

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