JPS5531118A - Surface-treating method for metal - Google Patents

Surface-treating method for metal

Info

Publication number
JPS5531118A
JPS5531118A JP10289578A JP10289578A JPS5531118A JP S5531118 A JPS5531118 A JP S5531118A JP 10289578 A JP10289578 A JP 10289578A JP 10289578 A JP10289578 A JP 10289578A JP S5531118 A JPS5531118 A JP S5531118A
Authority
JP
Japan
Prior art keywords
sputtering
alloy
parts
coating
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10289578A
Other languages
Japanese (ja)
Inventor
Sumi Yoshida
Yoshiyuki Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10289578A priority Critical patent/JPS5531118A/en
Publication of JPS5531118A publication Critical patent/JPS5531118A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/16—Oxidising using oxygen-containing compounds, e.g. water, carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated

Abstract

PURPOSE:To improve corrosion resistance of oxide coating, by cleaning through sputtering the surface of Zr or Zr alloy as a pretreatment in forming uniform protective oxide coating on the surface of Zr or Zr alloy by heating it with high-temp., high-press. steam. CONSTITUTION:Parts made of Zr or Zr alloy are cleaned by sputtering with an inert gas such as Ar etc. The parts are then put into an autoclave and heated with high-temp., high-press. steam at 400 deg.C, 105kg/cm<2> to form a dense, uniform corrosion resistant ZrO2 coating on the surface of the parts. Cleaning is operated by sputtering in place of acid treatment, hence the ZrO2 coating is never deteriorated with residual acid, keeping excellent corrosion resistance.
JP10289578A 1978-08-25 1978-08-25 Surface-treating method for metal Pending JPS5531118A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10289578A JPS5531118A (en) 1978-08-25 1978-08-25 Surface-treating method for metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10289578A JPS5531118A (en) 1978-08-25 1978-08-25 Surface-treating method for metal

Publications (1)

Publication Number Publication Date
JPS5531118A true JPS5531118A (en) 1980-03-05

Family

ID=14339587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10289578A Pending JPS5531118A (en) 1978-08-25 1978-08-25 Surface-treating method for metal

Country Status (1)

Country Link
JP (1) JPS5531118A (en)

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