JPS5258081A - Apparatus for attaching thin film - Google Patents

Apparatus for attaching thin film

Info

Publication number
JPS5258081A
JPS5258081A JP13409275A JP13409275A JPS5258081A JP S5258081 A JPS5258081 A JP S5258081A JP 13409275 A JP13409275 A JP 13409275A JP 13409275 A JP13409275 A JP 13409275A JP S5258081 A JPS5258081 A JP S5258081A
Authority
JP
Japan
Prior art keywords
thin film
attaching thin
attaching
acclerating
various substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13409275A
Other languages
Japanese (ja)
Inventor
Kazutoshi Ashikawa
Hiroshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13409275A priority Critical patent/JPS5258081A/en
Publication of JPS5258081A publication Critical patent/JPS5258081A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form thin adhesive metallized films on various substrates by acclerating evaporated ions generated in a discharge region.
JP13409275A 1975-11-10 1975-11-10 Apparatus for attaching thin film Pending JPS5258081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13409275A JPS5258081A (en) 1975-11-10 1975-11-10 Apparatus for attaching thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13409275A JPS5258081A (en) 1975-11-10 1975-11-10 Apparatus for attaching thin film

Publications (1)

Publication Number Publication Date
JPS5258081A true JPS5258081A (en) 1977-05-13

Family

ID=15120230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13409275A Pending JPS5258081A (en) 1975-11-10 1975-11-10 Apparatus for attaching thin film

Country Status (1)

Country Link
JP (1) JPS5258081A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS63227770A (en) * 1987-03-16 1988-09-22 Shinko Seiki Kk Ion plating device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49120877A (en) * 1973-03-20 1974-11-19
JPS50125976A (en) * 1974-03-22 1975-10-03
JPS5318330A (en) * 1976-08-04 1978-02-20 Toshiba Corp Solid pickup device
JPS5345097U (en) * 1976-09-21 1978-04-17
JPS5517105A (en) * 1978-07-21 1980-02-06 Konishiroku Photo Ind Co Ltd Electrophotographic photoreceptor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49120877A (en) * 1973-03-20 1974-11-19
JPS50125976A (en) * 1974-03-22 1975-10-03
JPS5318330A (en) * 1976-08-04 1978-02-20 Toshiba Corp Solid pickup device
JPS5345097U (en) * 1976-09-21 1978-04-17
JPS5517105A (en) * 1978-07-21 1980-02-06 Konishiroku Photo Ind Co Ltd Electrophotographic photoreceptor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS622032B2 (en) * 1979-12-04 1987-01-17 Matsushita Electric Ind Co Ltd
JPS63227770A (en) * 1987-03-16 1988-09-22 Shinko Seiki Kk Ion plating device

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