JPS51144191A - Production method of semiconductor - Google Patents

Production method of semiconductor

Info

Publication number
JPS51144191A
JPS51144191A JP6839975A JP6839975A JPS51144191A JP S51144191 A JPS51144191 A JP S51144191A JP 6839975 A JP6839975 A JP 6839975A JP 6839975 A JP6839975 A JP 6839975A JP S51144191 A JPS51144191 A JP S51144191A
Authority
JP
Japan
Prior art keywords
semiconductor
production method
processing
etching
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6839975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5759669B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Saburo Osaki
Koichi Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6839975A priority Critical patent/JPS51144191A/ja
Publication of JPS51144191A publication Critical patent/JPS51144191A/ja
Publication of JPS5759669B2 publication Critical patent/JPS5759669B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP6839975A 1975-06-05 1975-06-05 Production method of semiconductor Granted JPS51144191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6839975A JPS51144191A (en) 1975-06-05 1975-06-05 Production method of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6839975A JPS51144191A (en) 1975-06-05 1975-06-05 Production method of semiconductor

Publications (2)

Publication Number Publication Date
JPS51144191A true JPS51144191A (en) 1976-12-10
JPS5759669B2 JPS5759669B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-12-15

Family

ID=13372569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6839975A Granted JPS51144191A (en) 1975-06-05 1975-06-05 Production method of semiconductor

Country Status (1)

Country Link
JP (1) JPS51144191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5759669B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-12-15

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