JPS51142270A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS51142270A
JPS51142270A JP50066825A JP6682575A JPS51142270A JP S51142270 A JPS51142270 A JP S51142270A JP 50066825 A JP50066825 A JP 50066825A JP 6682575 A JP6682575 A JP 6682575A JP S51142270 A JPS51142270 A JP S51142270A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing semiconductor
substrate
subtrate
implanted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50066825A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5413346B2 (enExample
Inventor
Toru Hara
Minoru Mihara
Nobuyuki Toyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50066825A priority Critical patent/JPS51142270A/ja
Publication of JPS51142270A publication Critical patent/JPS51142270A/ja
Publication of JPS5413346B2 publication Critical patent/JPS5413346B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Light Receiving Elements (AREA)
JP50066825A 1975-06-02 1975-06-02 Method of manufacturing semiconductor device Granted JPS51142270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50066825A JPS51142270A (en) 1975-06-02 1975-06-02 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50066825A JPS51142270A (en) 1975-06-02 1975-06-02 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS51142270A true JPS51142270A (en) 1976-12-07
JPS5413346B2 JPS5413346B2 (enExample) 1979-05-30

Family

ID=13326990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50066825A Granted JPS51142270A (en) 1975-06-02 1975-06-02 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS51142270A (enExample)

Also Published As

Publication number Publication date
JPS5413346B2 (enExample) 1979-05-30

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