JPS51134566A - Semiconductor unit manufacturing process - Google Patents

Semiconductor unit manufacturing process

Info

Publication number
JPS51134566A
JPS51134566A JP5793575A JP5793575A JPS51134566A JP S51134566 A JPS51134566 A JP S51134566A JP 5793575 A JP5793575 A JP 5793575A JP 5793575 A JP5793575 A JP 5793575A JP S51134566 A JPS51134566 A JP S51134566A
Authority
JP
Japan
Prior art keywords
manufacturing process
semiconductor unit
unit manufacturing
msi
shallow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5793575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS557694B2 (cs
Inventor
Katsuyuki Inayoshi
Hiroshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5793575A priority Critical patent/JPS51134566A/ja
Publication of JPS51134566A publication Critical patent/JPS51134566A/ja
Publication of JPS557694B2 publication Critical patent/JPS557694B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP5793575A 1975-05-17 1975-05-17 Semiconductor unit manufacturing process Granted JPS51134566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5793575A JPS51134566A (en) 1975-05-17 1975-05-17 Semiconductor unit manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5793575A JPS51134566A (en) 1975-05-17 1975-05-17 Semiconductor unit manufacturing process

Publications (2)

Publication Number Publication Date
JPS51134566A true JPS51134566A (en) 1976-11-22
JPS557694B2 JPS557694B2 (cs) 1980-02-27

Family

ID=13069865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5793575A Granted JPS51134566A (en) 1975-05-17 1975-05-17 Semiconductor unit manufacturing process

Country Status (1)

Country Link
JP (1) JPS51134566A (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574175A (en) * 1978-11-29 1980-06-04 Nec Corp Preparing interpolation type mos semiconductor device
JPS5756927A (en) * 1981-07-28 1982-04-05 Hitachi Ltd Electrode structure for semiconductor device and manufacture thereof
JPS57208173A (en) * 1981-06-18 1982-12-21 Seiko Epson Corp Semiconductor integrated circuit device
JPS58183A (ja) * 1981-06-25 1983-01-05 Seiko Epson Corp 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57166678U (cs) * 1981-04-14 1982-10-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4996684A (cs) * 1973-01-16 1974-09-12
JPS4998578A (cs) * 1973-01-22 1974-09-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4996684A (cs) * 1973-01-16 1974-09-12
JPS4998578A (cs) * 1973-01-22 1974-09-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574175A (en) * 1978-11-29 1980-06-04 Nec Corp Preparing interpolation type mos semiconductor device
JPS57208173A (en) * 1981-06-18 1982-12-21 Seiko Epson Corp Semiconductor integrated circuit device
JPS58183A (ja) * 1981-06-25 1983-01-05 Seiko Epson Corp 半導体装置の製造方法
JPS5756927A (en) * 1981-07-28 1982-04-05 Hitachi Ltd Electrode structure for semiconductor device and manufacture thereof

Also Published As

Publication number Publication date
JPS557694B2 (cs) 1980-02-27

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