Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP5729475ApriorityCriticalpatent/JPS51134072A/en
Publication of JPS51134072ApublicationCriticalpatent/JPS51134072A/en
PURPOSE: To reduce the irregularity of sheet resistance by placing semi-conductor wafer and diffusion agent source element at a required angular inclination with carrier gas and carrying out a diffusion treatment.
COPYRIGHT: (C)1976,JPO&Japio
JP5729475A1975-05-161975-05-16Diffusion boat for the manufacture of semiconductor unit
PendingJPS51134072A
(en)