JPS51134072A - Diffusion boat for the manufacture of semiconductor unit - Google Patents

Diffusion boat for the manufacture of semiconductor unit

Info

Publication number
JPS51134072A
JPS51134072A JP5729475A JP5729475A JPS51134072A JP S51134072 A JPS51134072 A JP S51134072A JP 5729475 A JP5729475 A JP 5729475A JP 5729475 A JP5729475 A JP 5729475A JP S51134072 A JPS51134072 A JP S51134072A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor unit
diffusion boat
diffusion
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5729475A
Other languages
Japanese (ja)
Inventor
Yukio Takahashi
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5729475A priority Critical patent/JPS51134072A/en
Publication of JPS51134072A publication Critical patent/JPS51134072A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the irregularity of sheet resistance by placing semi-conductor wafer and diffusion agent source element at a required angular inclination with carrier gas and carrying out a diffusion treatment.
COPYRIGHT: (C)1976,JPO&Japio
JP5729475A 1975-05-16 1975-05-16 Diffusion boat for the manufacture of semiconductor unit Pending JPS51134072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5729475A JPS51134072A (en) 1975-05-16 1975-05-16 Diffusion boat for the manufacture of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5729475A JPS51134072A (en) 1975-05-16 1975-05-16 Diffusion boat for the manufacture of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS51134072A true JPS51134072A (en) 1976-11-20

Family

ID=13051521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5729475A Pending JPS51134072A (en) 1975-05-16 1975-05-16 Diffusion boat for the manufacture of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS51134072A (en)

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