JPS51123071A - Fabrication technique of semiconductor device - Google Patents

Fabrication technique of semiconductor device

Info

Publication number
JPS51123071A
JPS51123071A JP50047738A JP4773875A JPS51123071A JP S51123071 A JPS51123071 A JP S51123071A JP 50047738 A JP50047738 A JP 50047738A JP 4773875 A JP4773875 A JP 4773875A JP S51123071 A JPS51123071 A JP S51123071A
Authority
JP
Japan
Prior art keywords
fabrication technique
semiconductor device
resistivity
transistor
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50047738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5527467B2 (enrdf_load_html_response
Inventor
Tsutomu Fujita
Tadao Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50047738A priority Critical patent/JPS51123071A/ja
Publication of JPS51123071A publication Critical patent/JPS51123071A/ja
Publication of JPS5527467B2 publication Critical patent/JPS5527467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP50047738A 1975-04-18 1975-04-18 Fabrication technique of semiconductor device Granted JPS51123071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50047738A JPS51123071A (en) 1975-04-18 1975-04-18 Fabrication technique of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50047738A JPS51123071A (en) 1975-04-18 1975-04-18 Fabrication technique of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51123071A true JPS51123071A (en) 1976-10-27
JPS5527467B2 JPS5527467B2 (enrdf_load_html_response) 1980-07-21

Family

ID=12783673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50047738A Granted JPS51123071A (en) 1975-04-18 1975-04-18 Fabrication technique of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51123071A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108765A (ja) * 1981-12-23 1983-06-28 Clarion Co Ltd 半導体装置の製法
JPH02132823A (ja) * 1987-12-30 1990-05-22 Fujitsu Ltd 浅い接合を形成する方法及びその浅い接合を有する半導体装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOLID STATE ELECTRONICS#V19=1966 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108765A (ja) * 1981-12-23 1983-06-28 Clarion Co Ltd 半導体装置の製法
JPH02132823A (ja) * 1987-12-30 1990-05-22 Fujitsu Ltd 浅い接合を形成する方法及びその浅い接合を有する半導体装置

Also Published As

Publication number Publication date
JPS5527467B2 (enrdf_load_html_response) 1980-07-21

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