Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KKfiledCriticalSeiko Epson Corp
Priority to JP4673275ApriorityCriticalpatent/JPS51121253A/en
Publication of JPS51121253ApublicationCriticalpatent/JPS51121253A/en
PURPOSE: To provide a method of inscribing silicon wafers to attain zero defect of the elements and also reduce damage to the surface of the glass mask by preventing the silicon particles that are generated during inscription from adhering to the semiconductor device.
COPYRIGHT: (C)1976,JPO&Japio
JP4673275A1975-04-171975-04-17Letter inscriber for silicon wafers
PendingJPS51121253A
(en)