JPS51118382A - Manufacturing process for mos type semiconductor unit - Google Patents

Manufacturing process for mos type semiconductor unit

Info

Publication number
JPS51118382A
JPS51118382A JP4397575A JP4397575A JPS51118382A JP S51118382 A JPS51118382 A JP S51118382A JP 4397575 A JP4397575 A JP 4397575A JP 4397575 A JP4397575 A JP 4397575A JP S51118382 A JPS51118382 A JP S51118382A
Authority
JP
Japan
Prior art keywords
manufacturing process
type semiconductor
mos type
semiconductor unit
smoothing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4397575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5725987B2 (enrdf_load_html_response
Inventor
Takeshi Ishihara
Kiyohiro Kawasaki
Shiro Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4397575A priority Critical patent/JPS51118382A/ja
Publication of JPS51118382A publication Critical patent/JPS51118382A/ja
Publication of JPS5725987B2 publication Critical patent/JPS5725987B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP4397575A 1975-04-10 1975-04-10 Manufacturing process for mos type semiconductor unit Granted JPS51118382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4397575A JPS51118382A (en) 1975-04-10 1975-04-10 Manufacturing process for mos type semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4397575A JPS51118382A (en) 1975-04-10 1975-04-10 Manufacturing process for mos type semiconductor unit

Publications (2)

Publication Number Publication Date
JPS51118382A true JPS51118382A (en) 1976-10-18
JPS5725987B2 JPS5725987B2 (enrdf_load_html_response) 1982-06-02

Family

ID=12678708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4397575A Granted JPS51118382A (en) 1975-04-10 1975-04-10 Manufacturing process for mos type semiconductor unit

Country Status (1)

Country Link
JP (1) JPS51118382A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5725987B2 (enrdf_load_html_response) 1982-06-02

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