JPS51117871A - Semiconductor substrate processing method - Google Patents

Semiconductor substrate processing method

Info

Publication number
JPS51117871A
JPS51117871A JP4311475A JP4311475A JPS51117871A JP S51117871 A JPS51117871 A JP S51117871A JP 4311475 A JP4311475 A JP 4311475A JP 4311475 A JP4311475 A JP 4311475A JP S51117871 A JPS51117871 A JP S51117871A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
processing method
substrate processing
warping
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4311475A
Other languages
Japanese (ja)
Inventor
Osamu Takayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4311475A priority Critical patent/JPS51117871A/en
Publication of JPS51117871A publication Critical patent/JPS51117871A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: By bombarding ions on the side opposite the surface where semiconductor device formation is to take place at the initial or intermediary stage of the device manufacturing process on a semiconductor substrate, warping of wafers can be minimized and the yield of the device on the surface can be improved.
COPYRIGHT: (C)1976,JPO&Japio
JP4311475A 1975-04-09 1975-04-09 Semiconductor substrate processing method Pending JPS51117871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4311475A JPS51117871A (en) 1975-04-09 1975-04-09 Semiconductor substrate processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4311475A JPS51117871A (en) 1975-04-09 1975-04-09 Semiconductor substrate processing method

Publications (1)

Publication Number Publication Date
JPS51117871A true JPS51117871A (en) 1976-10-16

Family

ID=12654793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4311475A Pending JPS51117871A (en) 1975-04-09 1975-04-09 Semiconductor substrate processing method

Country Status (1)

Country Link
JP (1) JPS51117871A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5373082A (en) * 1976-12-13 1978-06-29 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mos transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5373082A (en) * 1976-12-13 1978-06-29 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mos transistor

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