JPS51117871A - Semiconductor substrate processing method - Google Patents
Semiconductor substrate processing methodInfo
- Publication number
- JPS51117871A JPS51117871A JP4311475A JP4311475A JPS51117871A JP S51117871 A JPS51117871 A JP S51117871A JP 4311475 A JP4311475 A JP 4311475A JP 4311475 A JP4311475 A JP 4311475A JP S51117871 A JPS51117871 A JP S51117871A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- processing method
- substrate processing
- warping
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: By bombarding ions on the side opposite the surface where semiconductor device formation is to take place at the initial or intermediary stage of the device manufacturing process on a semiconductor substrate, warping of wafers can be minimized and the yield of the device on the surface can be improved.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4311475A JPS51117871A (en) | 1975-04-09 | 1975-04-09 | Semiconductor substrate processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4311475A JPS51117871A (en) | 1975-04-09 | 1975-04-09 | Semiconductor substrate processing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51117871A true JPS51117871A (en) | 1976-10-16 |
Family
ID=12654793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4311475A Pending JPS51117871A (en) | 1975-04-09 | 1975-04-09 | Semiconductor substrate processing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51117871A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373082A (en) * | 1976-12-13 | 1978-06-29 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of mos transistor |
-
1975
- 1975-04-09 JP JP4311475A patent/JPS51117871A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373082A (en) * | 1976-12-13 | 1978-06-29 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of mos transistor |
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