JPS51114764A - Drying furnace - Google Patents

Drying furnace

Info

Publication number
JPS51114764A
JPS51114764A JP3910775A JP3910775A JPS51114764A JP S51114764 A JPS51114764 A JP S51114764A JP 3910775 A JP3910775 A JP 3910775A JP 3910775 A JP3910775 A JP 3910775A JP S51114764 A JPS51114764 A JP S51114764A
Authority
JP
Japan
Prior art keywords
drying furnace
drying
photoregister
coated
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3910775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5426024B2 (OSRAM
Inventor
Hiroshi Maejima
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3910775A priority Critical patent/JPS51114764A/ja
Publication of JPS51114764A publication Critical patent/JPS51114764A/ja
Publication of JPS5426024B2 publication Critical patent/JPS5426024B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP3910775A 1975-04-02 1975-04-02 Drying furnace Granted JPS51114764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3910775A JPS51114764A (en) 1975-04-02 1975-04-02 Drying furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3910775A JPS51114764A (en) 1975-04-02 1975-04-02 Drying furnace

Publications (2)

Publication Number Publication Date
JPS51114764A true JPS51114764A (en) 1976-10-08
JPS5426024B2 JPS5426024B2 (OSRAM) 1979-09-01

Family

ID=12543838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3910775A Granted JPS51114764A (en) 1975-04-02 1975-04-02 Drying furnace

Country Status (1)

Country Link
JP (1) JPS51114764A (OSRAM)

Also Published As

Publication number Publication date
JPS5426024B2 (OSRAM) 1979-09-01

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